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Intrinsic Point Defects and Their Control in Silicon Crystal Growth and Wafer Processing

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Authors
  1. R. Falster
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  2. V. V. Voronkov
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Falster, R., Voronkov, V.V. Intrinsic Point Defects and Their Control in Silicon Crystal Growth and Wafer Processing. MRS Bulletin 25, 28–32 (2000). https://doi.org/10.1557/mrs2000.95

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