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Kaldor, S.K. Broadband Frequency-Tunable Micromechanical Oscillator Promises to Extend the Applicability of Microelectromechanical Systems (MEMS). MRS Bulletin 25, 5 (2000). https://doi.org/10.1557/mrs2000.235
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DOI: https://doi.org/10.1557/mrs2000.235