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Atom-by-atom fabrication by electron beam via induced phase transformations

  • Single Atom Fabrication with Beams and Probes
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Abstract

New developments in manufacturing and automation, from three-dimensional printing to the “Internet of things,” signify dramatic changes in our society. The push toward quantum materials is driving device fabrication toward atomic precision. Recent results suggest that scanning transmission electron microscopy (STEM) with sub-angstrom scale beams could offer a solution. However, a detailed theoretical understanding of the interaction of the electron beam with solids is needed to form a basis for new technology. This article summarizes the existing literature on electron-beam interactions with solids with a focus on irreversible transformation. We further suggest that the theoretical framework of a two-temperature model developed for fast ion damage in solids could be applicable to predicting the effects of fast electrons. Recent results from STEM-directed epitaxial growth on crystalline–amorphous interfaces are discussed in detail. Finally, perspectives on the development of this field in the near future are offered.

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Authors and Affiliations

  1. Department of Physics, Arizona State University, USA

    Nan Jiang

  2. Materials Science and Technology Division, Oak Ridge National Laboratory, USA

    Eva Zarkadoula

  3. John A. Paulson School of Engineering and Applied Sciences, Harvard University, USA

    Prineha Narang

  4. Bredesen Center for Interdisciplinary Research and Graduate Education, University of Tennessee, Knoxville, USA

    Artem Maksov

  5. Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, USA

    Ivan Kravchenko & Stephen Jesse

  6. Materials Science and Engineering Division, Oak Ridge National Laboratory, USA

    Albina Borisevich

  7. Institute for Functional Imaging of Materials, and Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, USA

    Sergei V. Kalinin

Authors
  1. Nan Jiang
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  2. Eva Zarkadoula
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  3. Prineha Narang
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  4. Artem Maksov
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  7. Stephen Jesse
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  8. Sergei V. Kalinin
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Jiang, N., Zarkadoula, E., Narang, P. et al. Atom-by-atom fabrication by electron beam via induced phase transformations. MRS Bulletin 42, 653–659 (2017). https://doi.org/10.1557/mrs.2017.183

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  • DOI: https://doi.org/10.1557/mrs.2017.183

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