Abstract
This article reviews the potential of graphene and related two-dimensional (2D) materials for applications in micro- and nanoelectronics. In addition to graphene, special emphasis is placed on transition metal dichalcogenides (TMDs). First, we discuss potential solutions for application-scale material growth, in particular chemical vapor deposition. We describe challenges for electrical contacts and dielectric interfaces with 2D materials. The device-related sections in this review first weigh the pros and cons of semi-metal graphene as a field-effect transistor (FET) channel material for logic and radio frequency applications. This is followed by an introduction to alternate graphene switch concepts that utilize the particular properties of the material, namely tunnel FETs, vertical devices, and bilayer pseudospin FETs. The final section is dedicated to semiconducting TMDs and their integration in FETs using the examples ofn-type molybdenum disulfide (MoS2) andp-type tungsten diselenide (WSe2).
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Acknowledgments
M.L. acknowledges support from the European Commission through a STREP project (GRADE, No. 317839), an ERC Starting Grant (InteGraDe, No. 307311), as well as the German Research Foundation (DFG, LE 2440/1–1 and 2–1). L.J.L. thanks the support from Academia Sinica and National Science Council Taiwan (102–2119-M-001–005). F.S. acknowledges financial support from the Excellence Research Grant and the Intra-Faculty Research Grant of TU Ilmenau and from DFG (SCHW 729/16–1). F.S. would like to thank A.H. MacDonald for fruitful discussions on BiSFETs. T.P. would like to thank the partial funding support of the ONR PECASE program. All authors thank Stefan Wagner for support with the artwork of the figures.
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Lemme, M.C., Li, LJ., Palacios, T. et al. Two-dimensional materials for electronic applications. MRS Bulletin 39, 711–718 (2014). https://doi.org/10.1557/mrs.2014.138
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DOI: https://doi.org/10.1557/mrs.2014.138