A piezoelectric biomedical microelectromechanical system (bioMEMS) cantilever device was designed and fabricated to act as either a sensing element for muscle tissue contraction or as an actuator to apply mechanical force to cells. The sensing ability of the piezoelectric cantilevers was shown by monitoring the electrical signal generated from the piezoelectric aluminum nitride in response to the contraction of iPSC-derived cardiomyocytes cultured on the piezoelectric cantilevers. Actuation was demonstrated by applying electrical pulses to the piezoelectric cantilever and observing bending via an optical detection method. This piezoelectric cantilever device was designed to be incorporated into body-on-a-chip systems.
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This work was funded by the National Institutes of Health (Grant numbers 1R44TR001326, 2R44TR001326, and 5R01NS050452). This work was performed in part at the Cornell NanoScale Science & Technology Facility (CNF), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the National Science Foundation (Grant NNCI-1542081).
The supplementary material for this article can be found at https://doi.org/10.1557/mrc.2019.129.
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Coln, E.A., Colon, A., Long, C.J. et al. Piezoelectric bioMEMS cantilever for measurement of muscle contraction and for actuation of mechanosensitive cells. MRS Communications 9, 1186–1192 (2019). https://doi.org/10.1557/mrc.2019.129