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Optical properties of high-quality nanohole arrays in gold made using soft-nanoimprint lithography

  • Plasmonics, Photonics, and Metamaterials Research Letter
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Abstract

We present a novel soft-nanoimprint procedure to fabricate high-quality sub-wavelength hole arrays in optically thick films of gold on glass substrates. We fabricate 0.5 × 0.5 mm2 structures composed of a square array of 180 nm-diameter holes with a 780 nm pitch. Optical angular transmission measurements on the arrays show clear extraordinary transmission peaks corresponding to the dispersion of surface plasmon polaritons propagating on either side of the metal film. The transmission features can be strongly controlled by engineering the dielectric environment around the holes. As the nanoimprint procedure enables fabrication of nanoscale patterns over wafer-scale areas at low cost, these imprinted metal nanoparticle arrays can find applications in, e.g., optical components, photovoltaics, integrated optics, and microfluidics.

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Acknowledgments

We thank Ewold Verhagen for useful discussions and insights. The AMOLF part of this work is part of the research program of FOM which is financially supported by NWO. It is also supported by the European Research Counsel and by NANONED, a nanotechnology program of the Dutch Ministry of Economic Affairs.

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Authors and Affiliations

  1. Philips Research, High Tech Campus 4, 5656, AE, Eindhoven, The Netherlands

    M. A. Verschuuren

  2. Huygens Laboratory, P.O. Box 9504, 2300, RA, Leiden, The Netherlands

    M. J. A. de Dood & D. Stolwijk

  3. Philips Research, High Tech Campus 4, 5656, AE, Eindhoven, The Netherlands

    G. W. ’t Hooft

  4. Huygens Laboratory, P.O. Box 9504, 2300, RA, Leiden, The Netherlands

    G. W. ’t Hooft

  5. Centre for Nanophotonics, FOM Institute AMOLF, Science Park 104, 1098, XG, Amsterdam, The Netherlands

    A. Polman

Authors
  1. M. A. Verschuuren
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  2. M. J. A. de Dood
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  3. D. Stolwijk
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  4. G. W. ’t Hooft
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  5. A. Polman
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Corresponding author

Correspondence to A. Polman.

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Verschuuren, M.A., de Dood, M.J.A., Stolwijk, D. et al. Optical properties of high-quality nanohole arrays in gold made using soft-nanoimprint lithography. MRS Communications 5, 547–553 (2015). https://doi.org/10.1557/mrc.2015.70

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  • DOI: https://doi.org/10.1557/mrc.2015.70

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