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On the bending strength of single-crystal silicon theta-like specimens Rebecca Kirkpatrick

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Abstract

A new theta geometry was developed for microscale bending strength measurements. This new “gap” theta specimen was a modification of the arch theta specimen that enabled microscale tensile testing. The gap theta specimen was demonstrated here on single-crystal silicon, microfabricated using two different etch processes. The resulting sample strengths were described by three-parameter Weibull distributions derived from parameters determined using established arch theta strengths, assuming a specimen-geometry and -size invariant flaw distribution and an approximate loading configuration.

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Acknowledgment

The authors thank George D. Quinn at the National Institute of Standards and Technology (NIST) for guidance with Weibull statistics. Research was performed in part at the NIST Center for Nanoscale Science and Technology. Certain commercial equipment, instruments, or materials are identified in this report to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by NIST, nor is it intended to imply that the materials or equipment identified are necessarily the best available for the purpose.

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  1. Materials Measurement Science Division, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland, 20899, USA

    William A. Osborn, Michael S. Gaither, Richard S. Gates, Frank W. DelRio & Robert F. Cook

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  1. William A. Osborn
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  2. Michael S. Gaither
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  3. Richard S. Gates
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  4. Frank W. DelRio
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  5. Robert F. Cook
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Correspondence to Robert F. Cook.

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Osborn, W.A., Gaither, M.S., Gates, R.S. et al. On the bending strength of single-crystal silicon theta-like specimens Rebecca Kirkpatrick. MRS Communications 3, 113–117 (2013). https://doi.org/10.1557/mrc.2013.18

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  • DOI: https://doi.org/10.1557/mrc.2013.18

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