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Effect of N2 flow on the structure and mechanical properties of (CrTaTiVZr)Nx coatings processed by reactive magnetron sputtering

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Abstract

(CrTaTiVZr)Nx coatings were deposited via reactive radio frequency magnetron sputtering. The effects of N2 flow at 0–8 SCCM on the chemical composition, microstructure, and mechanical properties of the films were investigated. The coatings deposited at a N2 flow of ≤2 SCCM showed a featureless structure with an amorphous phase. When the N2 flow was at 4 SCCM, two distinct layers were observed, namely, the bottom layer (close to the substrate) with an amorphous structure and the top layer with a fibrous structure and face-centered cubic phase. When the N2 flow was further increased, the structure was converted from fibers to columns with larger grains. Accordingly, the maximum hardness value of 36.4 GPa was achieved at a N2 flow of 4 SCCM, thereby indicating that (CrTaTiVZr)Nx coatings may be suitable as hard protective coatings.

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ACKNOWLEDGMENT

The authors gratefully acknowledge the financial support for this research by the Ministry of Science and Technology of Taiwan under Grant No. 103-2622-E-167-011-CC3.

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Authors and Affiliations

  1. Department of Mechanical Engineering, National Chin-Yi University of Technology, Taichung, 411, Republic of China

    Zue-Chin Chang

  2. Department of Materials Science and Engineering, National Chung Hsing University, Taichung, 40227, Republic of China

    Du-Cheng Tsai & Erh-Chiang Chen

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  1. Zue-Chin Chang
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Correspondence to Zue-Chin Chang.

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Chang, ZC., Tsai, DC. & Chen, EC. Effect of N2 flow on the structure and mechanical properties of (CrTaTiVZr)Nx coatings processed by reactive magnetron sputtering. Journal of Materials Research 30, 924–934 (2015). https://doi.org/10.1557/jmr.2015.79

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