Abstract
The article discusses the structure and properties of noncrystalline carbon films synthesized by ion-plasma sputtering of a graphite target in an argon atmosphere at direct current. Analysis of the molecular structure of carbon films was performed using Raman spectroscopy and dependence of the structure of synthesized films on the synthesis temperature and substrate material was revealed. Besides the main G peak possesses the values in a broad frequency range from 1500 to 1575 cm−1. The evolution of molecular structure peculiarities of synthesized carbon films depending on the synthesis conditions was clearly shown using the numerical methods of the Raman spectra decomposition. Studies of the optical spectra showed that the band gap of synthesized films varies from 0.78 to 1.67 eV and with increasing optical band gap, the value of G peak position decreases under laser excitation of 2.62 and 1.96 eV.
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R. Setton, P. Bernier, and S. Lefrant: Carbon Molecules and Materials (Taylor & Francis Inc., USA and Canada, 2002); p. 49.
J. Tersoff and R.S. Ruoff: RS structural properties of a carbon-nanotube crystal. Phys. Rev. Lett. 73(5), 676 (1994).
J.L. Delgado, A. Herranz, and N.J. Martın, T.J. Booth, V.V. Khotkevich, S.V. Morozov, and A.K. Geim: The nano-forms of carbon. Mater. Chem. 18, 1417 (2008).
K.S. Novoselov, D. Jiang, F. Schedin, T.J. Booth, V.V. Khotkevich, S.V. Morozov, and A.K. Geim: Two-dimensional atomic crystals. Proc. Natl. Acad. Sci. U. S. A. 102, 10451 (2005).
K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, M.I. Katsnelson, I.V. Grigorieva, S.V. Dubonos, and A.A. Firsov: Two-dimensional gas of massless Dirac fermions in graphene. Nature 438, 197 (2005).
M.I. Katsnelson: Zitterbewegung, chirality, and minimal conductivity in graphene. Eur. Phys. J. B 51, 157 (2006).
S. Bhattacharyya and S.R.P. Silva: Transport properties of low-dimensional amorphous carbon films. Thin Solid Films 482, 94 (2005).
S.V. Morozov, K.S. Novoselov, and A.K. Geim: Electron transport in graphene. Usp. Fiz. Nauk 178(7), 776 (2008).
S. Wang, J. Zhu, J. Wang, X. Yin, and X. Han: Raman spectroscopy and mechanical properties of multilayer tetrahedral amorphous carbon films. Thin Solid Films 519, 4906 (2011).
Y. Miyajima, J.M. Shannon, S.J. Henley, V. Stolojan, D.C. Cox, and S.R.P. Silva: Electrical conduction mechanism in laser deposited amorphous carbon. Thin Solid Films 516, 257 (2007).
J. Filik, P.W. May, S.R.J. Pearce, R.K. Wild, and K.R. Hallam: XPS and laser Raman analysis of hydrogenated amorphous carbon films. Diamond Relat. Mater. 12, 974 (2003).
C. Casiraghi, A.C. Ferrari, and J. Robertson: Raman spectroscopy of hydrogenated amorphous carbons. Phys. Rev. B 72, 085401 (2005).
K.W.R. Gilkes, H.S. Sands, D.N. Batchelder, J. Robertson, and W.I. Milne: Direct observation of sp3 bonding in tetrahedral amorphous carbon using ultraviolet Raman spectroscopy. Appl. Phys. Lett. 70(15), 1980 (1997).
A.A. Babaev, S.B. Sultanov, M.Sh. Abdulvagabov, and E.I. Terukov: Electrical, optical and mechanical properties of amorphous hydrogenated carbon obtained under different conditions of deposition. Fiz. Tekh. Poluprovodn. 45(1), 120 (2011).
V.L. Merkulov, J.S. Lannin, C.H. Munro, S.A. Asher, V.S. Veerasamy, and W.I. Milne: UV studies of tetrahedral bonding in diamondlike amorphous carbon. Phys. Rev. Lett. 78(25), 4869 (1997).
J. Robertson: Hard amorphous (diamond-like) carbons. Mater. Sci. Eng., R 37, 129 (2002).
N. Paik: Raman and XPS studies of DLC films prepared by a magnetron sputter-type negative ion source. Surf. Coat. Technol. 200, 2170 (2005).
A.C. Ferrari and J. Robertson: Resonant Raman spectroscopy of disordered, amorphous, and diamondlike carbon. Phys. Rev. B 64, 075414 (2001).
A.C. Ferrari and J. Robertson: Interpretation of Raman spectra of disordered and amorphous carbon. Phys. Rev. B 61(20), 14095 (2000).
Sh.Sh. Sarsembinov, O.Yu. Prikhodko, A.P. Ryaguzov, S.Ya. Maksimova, Ye.A. Daineko, and F.A. Mahmoud: Electronic properties of diamond-like carbon films modified by silver nanoclusters. Phys. Status Solidi C 7, 805 (2010).
S.M. Huang, Z. Sun, Y.F. Lu, and M.H. Hong: Ultraviolet and visible Raman spectroscopy characterization of diamond–like carbon film growth by pulsed laser deposition. Appl. Phys. A 74, 519 (2002).
J. Wagner, M. Ramsteiner, Ch. Wild, and P. Koidl: Resonant Raman scattering of amorphous carbon and polycrystalline diamond films. Phys. Rev. B 40, 1817 (1989).
N. Savvides and N.J. Bell: Microhardness and Young’s modulus of diamond and diamondlike carbon films. J. Appl. Phys. 72(7), 2791 (1992).
M.A. Tamor and W.C. Vassell: Raman “fingerprinting” of amorphous carbon films. J. Appl. Phys. 76(6), 3823 (1994).
F. Tuinstra and J.L. Koening: Raman spectrum of graphite. J. Chem. Phys. 53, 1126 (1970).
W. Windl, P. Pavone, K. Karch, O. Shutt, D. Strauch, P. Giannozzi, and S. Baroni: Second-order Raman spectra of diamond from ab initio phonon calculations. Phys. Rev. B 48, 3164 (1993).
S. Prawer, K.W. Nugent, Y. Lifshits, G.D. Lempert, E. Grossman, J. Kulik, I. Avigal, and R. Kalish: Systematic variation of the Raman spectra of DLC films as a function of sp2:sp3 composition. Diamond Relat. Mater. 5, 433 (1996).
A.C. Ferrari and J. Robertson: Raman spectroscopy of amorphous, nanostructured, diamond–like carbon, and nanodiamond. Philos. Trans. R. Soc., A 362, 2477 (2004).
J. Schwan, S. Ulrich, V. Batori, H. Ehrhardt, and S.R.P. Silva: Raman spectroscopy on amorphous carbon films. J. Appl. Phys. 80, 440 (1996).
A.C. Ferrari and J. Robertson: Origin of the 1150-cm−1 Raman mode in nanocrystalline diamond. Phys. Rev. B 63, 121405–1 (2001).
J. Tauc: Optical properties of semiconductors in the visible and ultra-violet ranges. Prog. Semicond. 9, 89 (1965).
M. Chhowalla, J. Robertson, C.W. Chen, S.R.P. Silva, C.A. Davis, G.A.J. Amaratunga, and W.I. Milne: Influence of ion energy and substrate temperature on the optical and electronic properties of tetrahedral amorphous carbon (ta-C) films. J. Appl. Phys. 81(1), 139 (1997).
ACKNOWLEDGMENTS
This work was supported by the grant of Ministry of Education and Science of the Republic of Kazakhstan No.1094/GF.
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Ryaguzov, A.P., Yermekov, G.A., Nurmamytov, T.E. et al. Visible Raman spectroscopy of carbon films synthesized by ion-plasma sputtering of graphite. Journal of Materials Research 31, 127–136 (2016). https://doi.org/10.1557/jmr.2015.391
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DOI: https://doi.org/10.1557/jmr.2015.391