Abstract
Group III nitrides are promising materials for light emitting diodes (LEDs). The occurrence of structural defects strongly affects the efficiency of these LEDs. We investigate the optical properties of basal plane stacking faults (BFSs), and the assignment of specific spectral features to distinct defect types by direct correlation of localized emission bands measured by cathodoluminescence in a scanning electron microscope with defects found in high resolution (scanning) transmission electron microscopy and electron beam induced current at identical sample spots. Thus, we are able to model the electronic structure of BSFs addressing I1, I2, and E type BSFs in GaN and AlGaN with low Al content. We find hints that BSFs in semipolar AlGaN layers cause local changes of the Al content, which strongly affects the usability of AlGaN as an electron blocking layer in nitride based LEDs.
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P. Schlotter, R. Schmidt, and J. Schneider: Luminescence conversion of blue light emitting diode. Appl. Phys. A 64, 417 (1997).
M. Raukas, J. Kelso, Y. Zheng, K. Bergenek, D. Eisert, A. Linkov, and F. Jermann: Ceramic Phosphors for Light Conversion in LEDs. ECS J. Solid State Sci. Technol. 2, R3168 (2013).
S. Nakamura, M. Senoh, N. Iwasa, and S. Nagahama: High-Brightness InGaN Blue, Green and Yellow Light-Emitting Diodes with Quantum Well Structures. Jpn. J. Appl. Phys. 34, L797 (1995).
M-H. Kim, M.F. Schubert, Q. Dai, J.K. Kim, E.F. Schubert, J. Piprek, and Y. Park: Origin of efficiency droop in GaN-based light-emitting diodes. Appl. Phys. Lett. 91, 183507 (2007).
Y.C. Shen, G.O. Mueller, S. Watanabe, N.F. Gardner, A. Munkholm, and M.R. Krames: Auger recombination in InGaN measured by photoluminescence. Appl. Phys. Lett. 91, 141101 (2007).
J. Piprek: Efficiency droop in nitride-based light-emitting diodes. Phys. Status Solidi A 207, 2217 (2010).
J. Iveland, L. Martinelli, J. Peretti, J.S. Speck, and C. Weisbuch: Direct Measurement of Auger Electrons Emitted from a Semiconductor Light-Emitting Diode under Electrical Injection: Identification of the Dominant Mechanism for Efficiency Droop. Phys. Rev. Lett. 110, 177406 (2013).
J. Piprek and Z.M. Simon Li: Origin of InGaN light-emitting diode efficiency improvements using chirped AlGaN multi-quantum barriers. Appl. Phys. Lett. 102, 023510 (2013).
M. Binder, A. Nirschl, R. Zeisel, T. Hager, H-J. Lugauer, M. Sabathil, D. Bougeard, J. Wagner, and B. Galler: Identification of nnp and npp Auger recombination as significant contributor to the efficiency droop in (GaIn)N quantum wells by visualization of hot carriers in photoluminescence. Appl. Phys. Lett. 103, 071108 (2013).
F. Bertazzi, M. Goano, X. Zhou, M. Calciati, G. Ghione, M. Matsubara, and E. Bellotti: Looking for Auger signatures in III-nitride light emitters: A full-band Monte Carlo perspective. Appl. Phys. Lett. 106, 061112 (2015).
P. Kozodoy, J.P. Ibbetson, H. Marchand, P.T. Fini, S. Keller, J.S. Speck, S.P. DenBaars, and U.K. Mishra: Electrical characterization of GaN p-n junctions with and without threading dislocations. Appl. Phys. Lett. 73, 975 (1998).
J.W.P. Hsu, M.J. Manfra, D.V. Lang, S. Richter, S.N.G. Chu, A.M. Sergent, R.N. Kleiman, L.N. Pfeiffer, and R.J. Molnar: Inhomogeneous spatial distribution of reverse bias leakage in GaN Schottky diodes. Appl. Phys. Lett. 78, 1685 (2001).
J.W.P. Hsu, M.J. Manfra, S.N.G. Chu, C.H. Chen, L.N. Pfeiffer, and R.J. Molnar: Effect of growth stoichiometry on the electrical activity of screw dislocations in GaN films grown by molecular-beam epitaxy. Appl. Phys. Lett. 78, 3980 (2001).
E.J. Miller, X.Z. Dang, and E.T. Yu: Gate leakage current mechanisms in AlGaN/GaN heterostructure field-effect transistors. J. Appl. Phys. 88, 5951 (2000).
L. McCarthy, I. Smorchkova, H. Xing, P. Fini, S. Keller, J. Speck, S.P. DenBaars, M.J.W. Rodwell, and U.K. Mishra: Effect of threading dislocations on AlGaN/GaN heterojunction bipolar transistors. Appl. Phys. Lett. 78, 2235 (2001).
S. Ganguly, J. Verma, Z. Hu, H.G. Xing, and D. Jena: Performance enhancement of InAlN/GaN HEMTs by KOH surface treatment. Appl. Phys. Express 7, 034102 (2014).
S. Hafiz, F. Zhang, M. Monavarian, S. Okur, V. Avrutin, H. Morkoç, and U. Özgür: Estimation of carrier leakage in InGaN light emitting diodes from photocurrent measurements. In Proceedings of the International Society of Optical Engineering, Vol. 9003; SPIE, Bellingham, WA, 2014; p. 90031R.
T. Yokoyama, Y. Kamimura, K. Edagawa, and I. Yonenaga: Local current conduction due to edge dislocations in deformed GaN studied by scanning spreading resistance microscopy. Eur. Phys. J.: Appl. Phys. 61, 10102 (2013).
C.M. Drum: Intersecting faults on basal and prismatic planes in aluminium nitride. Philos. Mag. 11, 313 (1965).
D.N. Zakharov, Z. Liliental-Weber, B. Wagner, Z.J. Reitmeier, E.A. Preble, and R.F. Davis: Structural TEM study of nonpolar a-plane gallium nitride grown on \((11\bar 20)\) 4 H-SiC by organometallic vapor phase epitaxy. Phys. Rev. B 71, 235334 (2005).
G. Ramírez-Flores, H. Navarro-Contreras, A. Lastras-Martínez, R.C. Powell, and J.E. Greene: Temperature-dependent optical band gap of the metastable zinc-blende structure -GaN. Phys. Rev. B 50, 8433 (1994).
B. Monemar: Fundamental energy gap of GaN from photoluminescence excitation spectra. Phys. Rev. B 10, 676 (1974).
Y.T. Rebane, Y.G. Shreter, and M. Albrecht: Stacking Faults as Quantum Wells for Excitons in Wurtzite GaN. Phys. Status Solidi A 164, 141 (1997).
M. Albrecht, S. Christiansen, G. Salviati, C. Zanotti-Fregonara, Y.T. Rebane, Y.G. Shreter, M. Mayer, A. Pelzmann, M. Kamp, K.J. Ebeling, M.D. Bremser, R.F. Davis, and H.P. Strunk: Luminescence Related to Stacking Faults in Heterepitaxially Grown Wurtzite GaN. MRS Online Proc. Libr. 468, 293 (1997).
Z. Bandić, T. McGill, and Z. Ikonić: Electronic structure of GaN stacking faults. Phys. Rev. B 56, 3564 (1997).
I. Tischer, M. Feneberg, M. Schirra, H. Yacoub, R. Sauer, K. Thonke, T. Wunderer, F. Scholz, L. Dieterle, E. Müller, and D. Gerthsen: I 2 basal plane stacking fault in GaN: Origin of the 3.32 eV luminescence band. Phys. Rev. B 83, 035314 (2011).
Y.J. Sun, O. Brandt, U. Jahn, T.Y. Liu, A. Trampert, S. Cronenberg, S. Dhar, and K.H. Ploog: Impact of nucleation conditions on the structural and optical properties of M-plane \(GaN(1\bar 100)\) grown on \(\gamma - LiAl{O_2}\). J. Appl. Phys. 92, 5714 (2002).
B. Skromme, L. Chen, M. Mikhov, H. Yamane, M. Aoki, and F. DiSalvo: Properties of the 3.4 eV Luminescence Band in GaN and its Relation to Stacking Faults. Mater. Sci. Forum 457, 1613 (2004).
R. Liu, A. Bell, F.A. Ponce, C.Q. Chen, J.W. Yang, and M.A. Khan: Luminescence from stacking faults in gallium nitride. Appl. Phys. Lett. 86, 021908 (2005).
J. Lähnemann, O. Brandt, U. Jahn, C. Pfüller, C. Roder, P. Dogan, F. Grosse, A. Belabbes, F. Bechstedt, A. Trampert, and L. Geelhaar: Direct experimental determination of the spontaneous polarization of GaN. Phys. Rev. B 86, 081302 (2012).
J. Lähnemann, U. Jahn, O. Brandt, T. Flissikowski, P. Dogan, and H.T. Grahn: Luminescence associated with stacking faults in GaN. J. Phys. D: Appl. Phys. 47, 423001 (2014).
G. Jacopin, L. Rigutti, L. Largeau, F. Fortuna, F. Furtmayr, F.H. Julien, M. Eickhoff, and M. Tchernycheva: Optical properties of wurtzite/zinc-blende heterostructures in GaN nanowires. J. Appl. Phys. 110, 064313 (2011).
J. Piprek and S. Nakamura: Physics of high-power InGaN/GaN lasers. IEE Proc.: Optoelectron. 4, 145 (2002).
J.F. Van der Maelen Uría, S. García-Granda, and A. Menéndez-Velázquez: Solving one-dimensional Schrödinger-like equations using a numerical matrix method. Am. J. Phys. 64, 327 (1996).
F. Scholz, S. Schwaiger, J. Däubler, I. Tischer, K. Thonke, S. Neugebauer, S. Metzner, F. Bertram, J. Christen, H. Lengner, J. Thalmair, and J. Zweck: Semipolar GaInN quantum well structures on large area substrates. Phys. Status Solidi B 249, 464 (2012).
V. Darakchieva, B. Monemar, and A. Usui: On the lattice parameters of GaN. Appl. Phys. Lett. 91, 031911 (2007).
W. Paszkowicz, S. Podsiadło, and R. Minikayev: Rietveld-refinement study of aluminium and gallium nitrides. J. Alloys Compd. 382, 100 (2004). Proceedings of the European Materials Research Society Fall Meeting, Symposium B.
I. Vurgaftman and J.R. Meyer: Band parameters for nitrogen-containing semiconductors. J. Appl. Phys. 94, 3675 (2003).
F. Bernardini, V. Fiorentini, and D. Vanderbilt: Spontaneous polarization and piezoelectric constants of III-V nitrides. Phys. Rev. B 56, R10024 (1997).
M. Feneberg, K. Lange, C. Lidig, M. Wieneke, H. Witte, J. Bläsing, A. Dadgar, A. Krost, and R. Goldhahn: Anisotropic absorption and emission of bulk \((1\bar 100)\) AlN. Appl. Phys. Lett. 103, 232104 (2013).
L.C. de Carvalho, A. Schleife, and F. Bechstedt: Influence of exchange and correlation on structural and electronic properties of AlN, GaN, and InN. Phys. Rev. B 84, 195105 (2011).
J.S. Im, A. Moritz, F. Steuber, V. Härle, F. Scholz, and A. Hangleiter: Radiative carrier lifetime, momentum matrix element, and hole effective mass in GaN. Appl. Phys. Lett. 70, 631 (1997).
T. Azuhata, T. Sota, K. Suzuki, and S. Nakamura: Polarized Raman spectra in GaN. J. Phys.: Condens. Matter 7, L129 (1995).
M. Feneberg, M.F. Romero, M. Röppischer, C. Cobet, N. Esser, B. Neuschl, K. Thonke, M. Bickermann, and R. Goldhahn: Anisotropic absorption and emission of bulk \((1\bar 100)\) AlN. Phys. Rev. B 87, 235209 (2013b).
B. Neuschl, J. Helbing, M. Knab, H. Lauer, M. Madel, K. Thonke, T. Meisch, K. Forghani, F. Scholz, and M. Feneberg: Composition dependent valence band order in c-oriented wurtzite AlGaN layers. J. Appl. Phys. 116, 113506 (2014).
M. Feneberg, M. Röppischer, C. Cobet, N. Esser, J. Schörmann, T. Schupp, D.J. As, F. Hörich, J. Bläsing, A. Krost, and R. Goldhahn: Optical properties of cubic GaN from 1 to 20 eV. Phys. Rev. B 85, 155207 (2012).
M. Röppischer, R. Goldhahn, G. Rossbach, P. Schley, C. Cobet, N. Esser, T. Schupp, K. Lischka, and D.J. As: Dielectric function of zinc-blende AlN from 1 to 20 eV: Band gap and van Hove singularities. J. Appl. Phys. 106, 076104 (2009).
V. Bougrov, M.E. Levinshtein, S.L. Rumyantsev, and A. Zubrilov: Properties of Advanced Semiconductor Materials: GaN, AIN, InN, BN, SiC, SiGe; M.E. Levinshtein, S.L. Rumyantsev, and M. Shur eds.; John Wiley & Sons, New York, 2001.
T. Suzuki, H. Yaguchi, H. Okumura, Y. Ishida, and S. Yoshida: Optical Constants of Cubic GaN, AlN, and AlGaN Alloys. Jpn. J. Appl. Phys. 39, L497 (2000).
T. Wunderer, J. Hertkorn, F. Lipski, P. Brückner, M. Feneberg, M. Schirra, K. Thonke, I. Knoke, E. Meissner, A. Chuvilin, U. Kaiser, and F. Scholz: Optimization of semipolar GaInN/GaN blue/green light emitting diode structures on {1-101} GaN side facets. Proc. SPIE 6894, 68940V (2008).
M. Knab, M. Hocker, T. Felser, I. Tischer, J. Wang, F. Scholz, and K. Thonke: EBIC investigations on polar and semipolar InGaN LED structures. Phys. Status Solidi B (2015). doi: https://doi.org/10.1002/pssb.201552284.
I. Tischer, M. Feneberg, M. Schirra, H. Yacoub, R. Sauer, K. Thonke, T. Wunderer, F. Scholz, L. Dieterle, E. Müller, and D. Gerthsen: Stacking fault-related luminescence features in semi-polar GaN. Phys. Status Solidi B 248, 611 (2011).
I. Tischer, M. Frey, M. Hocker, L. Jerg, M. Madel, B. Neuschl, K. Thonke, R. Leute, F. Scholz, H. Groiss, E. Müller, and D. Gerthsen: Basal plane stacking faults in semipolar AlGaN: Hints to Al redistribution. Phys. Status Solidi B 251, 2321 (2014).
T. Narita, Y. Honda, M. Yamaguchi, and N. Sawaki: The surface diffusion of Ga species on an AlGaN facet structure in low pressure MOVPE. Phys. Status Solidi C 4, 2506 (2007).
L. Vegard: Die Konstitution der Mischkristalle und die Raumfüllung der Atome. Z. Phys. 5, 17 (1921).
ACKNOWLEDGMENTS
The author thanks A. Eifert, G. Neusser, and C. Kranz from FIB Center at University of Ulm for their supporting SEM-EDX/FIB investigations. Parts of this work have been financially supported by the Deutsche Forschungsgemeinschaft within the transregional research group “PolarCoN”. Further financial support by the German Federal Ministry of Education and Research (BMBF) within the framework of the “Deep UV-LED” project is gratefully acknowledged. Parts of this work received funding from the European Union’s Seventh Framework Program within the research project “ALIGHT”. H.G. acknowledges funding by the Austrian Science Fund (FWF): J3317-N27.
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Tischer, I., Hocker, M., Neuschl, B. et al. Optical properties of defects in nitride semiconductors. Journal of Materials Research 30, 2977–2990 (2015). https://doi.org/10.1557/jmr.2015.273
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DOI: https://doi.org/10.1557/jmr.2015.273