Skip to main content

Micropatterning of Fe-based bulk metallic glass surfaces by pulsed electrochemical micromachining

Journal of Materials Research volume 27, pages 3033–3040 (2012)Cite this article

Abstract

A new technique for micropatterning Fe-based bulk metallic glass surfaces is reported. The transpassive dissolution process is utilized for a defined localized material removal when using a pulsed electrochemical micromachining process. By applying submicrosecond pulses between a work piece and a tool electrode, microholes of high aspect ratio and depth of up to 100 urn can be machined into the bulk glassy Fe65.5Cr4Mo4Ga4P12C5B5.5 alloy. Two potential electrolytes are identified for the machining process. For these electrolytes, different reaction mechanisms are discussed. The possibility of machining more complex structures is demonstrated for the most promising electrolyte, a methanolic H2SO4 solution. The impact of the process parameters, pulse length and pulse voltage, on the machining gap and the surface quality of the machined structures is evaluated.

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

USD 39.95

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

FIG. 1.
FIG. 2.
FIG. 3.
FIG. 4.
FIG. 5.
FIG. 6.
FIG. 7.

References

  1. A.L. Greer and E. Ma: Bulk metallic glasses: At the cutting edge of materials research. MRS Bull. 32, 611 (2007).

    Article  CAS  Google Scholar 

  2. A. Inoue and N. Nishiyama: New bulk metallic glasses for applications as magnetic-sensing, chemical and structural material. MRS Bull. 32, 651 (2007).

    Article  CAS  Google Scholar 

  3. G. Kumar, H.X. Tang, and J. Schroers: Nanomoulding with amorphous metals. Nature 457, 868 (2009).

    Article  CAS  Google Scholar 

  4. D.L. Henann, V. Srivastava, H.K. Taylor, M.R. Hale, D.E. Hardt, and L. Anand: Metallic glasses: Viable tool materials for the production of surface microstructures in amorphous polymers by micro-hot-embossing. J. Micromech. Microeng. 19, 115030 (2009).

    Article  Google Scholar 

  5. S. Roth, M. Stoica, J. Degmova, U. Gaitzsch, J. Eckert, and L. Schultz: Fe-based bulk amorphous soft magnetic materials. J. Magn. Magn. Mater. 304, 192 (2006).

    Article  CAS  Google Scholar 

  6. Y. Saotome, K. Imai, S. Shioda, S. Shimizu, T. Zhang, and A. Inoue: The micro-nanoformability of Pt-based metallic glass and the nano-forming of three-dimensional structures. Intermetallics 10, 1241 (2002).

    Article  CAS  Google Scholar 

  7. A.A. Kundig, M. Cucinelli, P.J. Uggowitzer, and A. Dommann: Preparation of high aspect ratio surface microstructures out of a Zr-based bulk metallic glass. Microelectron. Eng. 67, 405 (2003).

    Article  Google Scholar 

  8. J. Schroers: Processing of bulk metallic glass. Adv. Mater. 22, 1566 (2010).

    Article  CAS  Google Scholar 

  9. N. Nishiyama and A. Inoue: Glass transition behavior and viscous flow working of Pd40Cu30Ni10P20 amorphous alloy. Mater. Trans., JIM 40, 64 (1999).

    Article  CAS  Google Scholar 

  10. J. Schroers, T. Nguyen, S. O’Keeffe, and A. Desai: Thermoplastic forming of bulk metallic glass - applications for MEMS and microstructure fabrication. Mater. Sci. Eng., A 449, 898 (2007).

    Article  Google Scholar 

  11. X.H. Chen, X.C. Zhang, Y. Zhang, and G.L. Chen: Fabrication and characterization of metallic glasses with a specific microstructure for micro-electro-mechanical system applications. J. Non-Cryst. Solids 354, 3308 (2008).

    Article  CAS  Google Scholar 

  12. D. Landolt, P-F. Chauvy, and O. Zinger: Electrochemical micro-machining, polishing and surface structuring of metals: Fundamental aspects and new developments. Electrochim. Acta 48, 3185 (2003).

    Article  CAS  Google Scholar 

  13. B. Bhattacharyya, J. Munda, and M. Malapati: Advancement in electrochemical micro-machining. Int. J. Mach. Tools Manuf 44, 1577 (2004).

    Article  Google Scholar 

  14. R. Schuster, V. Kirchner, P. Allongue, and G. Ertl: Electrochemical micromachining. Science 289, 98 (2000).

    Article  CAS  Google Scholar 

  15. L. Cagnon, V. Kirchner, M. Kock, R. Schuster, G. Ertl, W.T. Gmelin, and H. Kiick: Electrochemical micromachining of stainless steel by ultrashort voltage pulses. Z. Phys. Chem 217, 299 (2003).

    Article  CAS  Google Scholar 

  16. J.J. Maurer, J.J. Mallett, J.L. Hudson, S.E. Fick, Th.P. Moffat, and G.A. Shaw: Electrochemical micromachining of Hastelloy B-2 with ultrashort voltage pulses. Electrochim. Acta 55, 952 (2010).

    Article  CAS  Google Scholar 

  17. M. Kock, V. Kirchner, and R. Schuster: Electrochemical micromachining with ultrashort voltage pulses - a versatile method with lithographic precision. Electrochim. Acta 48, 3213 (2003).

    Article  CAS  Google Scholar 

  18. M. Sen and H.S. Shan: A review of electrochemical macro- and micro-hole drilling processes. Int. J. Mach. Tools Manuf 45, 137 (2005).

    Article  Google Scholar 

  19. J.A. Koza, R. Sueptitz, M. Uhlemann, L. Schultz, and A. Gebert: Electrochemical micromachining of a Zr-based bulk metallic glass using a micro-tool electrode technique. Intermetallics 19, 444 (2011).

    Article  Google Scholar 

  20. M. Stoica, J. Degmova, S. Roth, J. Eckert, H. Grahl, L. Schultz, A.R. Yavari, A. Kvick, and G. Heunen: Magnetic properties and phase transformations of bulk amorphous Fe-Based alloys obtained by different techniques. Mater. Trans. 43, 1966 (2002).

    Article  CAS  Google Scholar 

  21. M. Stoica, J. Eckert, S. Roth, F. Zhang, L. Schultz, and W.H. Wang: Mechanical behavior of Fe65.5Cr4Mo4Ga4P12C5B5.5 bulk metallic glass. Intermetallics 13, 764 (2005).

    Article  CAS  Google Scholar 

  22. M. Stoica, J. Eckert, S. Roth, A.R. Yavari, and L. Schultz: Fe65.5Cr4Mo4Ga4P12C5B5.5 BMGs: Sample preparation, thermal stability and mechanical properties. J. Alloys Compd. 434,171 (2007).

  23. B-F. Ju, Y-L. Chen, and Y. Ge: The art of electrochemical etching for preparing tungsten probes with controllable tip profile and characteristic parameters. Rev. Sci. Instrum. 82, 013707 (2011).

    Article  Google Scholar 

  24. R. Sueptitz, J. Koza, M. Uhlemann, M.A. Gebert, and L. Schultz: Magnetic field effect on the anodic behavior of a ferromagnetic electrode in acidic solutions. Electrochim. Acta 54, 2229 (2009).

    Article  CAS  Google Scholar 

  25. M. Pourbaix: Atlas of Electrochemical Equilibria in Aqueous Solutions (Pergamon Press, Oxford, 1966).

    Google Scholar 

  26. H-H. Strehblow: Nucleation and repassivation of corrosion pits for pitting on iron and nickel. Werkst. Korros. 27, 792 (1976).

    Article  CAS  Google Scholar 

  27. B.P. Löchel and H-H. Strehblow: On the mechanism of breakdown of passivity of iron for instationary conditions. Werkst. Korros. 31, 353 (1980).

    Article  Google Scholar 

  28. D.M. Jollie and P.G. Harrison: An in situ IR study of the thermal decomposition of trifluoroacetic acid. J. Chem. Soc, Perkin Trans 2 2, 1571 (1997).

  29. A.C. West and J. Newman: Current distributions on recessed electrodes. J. Electrochem. Soc. 138, 1620 (1991).

    Article  CAS  Google Scholar 

  30. B. Mazurkiewicz: Anodic passivity of iron in sulphuric acid. Electrochim. Acta 38, 495 (1993).

    Article  CAS  Google Scholar 

  31. O. Piotrowski, C. Madore, and D. Landolt: The mechanism of electropolishing of titanium in methanol-sulfuric acid electrolytes. J. Electrochem. Soc. 145, 2362 (1998).

    Article  CAS  Google Scholar 

  32. O. Piotrowski, C. Madore, and D. Landolt: Electropolishing of tantalum in sulfuric acid-methanol electrolytes. Electrochim. Acta 44, 3389 (1999).

    Article  CAS  Google Scholar 

Download references

Acknowledgment

The German Research Foundation (DFG) is gratefully acknowledged for the support of this work under Grant DFG Ge 1106/10 “Elektrochemische Mikrobearbeitung hochfester metallischer Gläser.”

Author information

Authors and Affiliations

  1. Chemistry of Functional Materials, Leibniz Institute for Solid State and Materials Research IFW Dresden, D-01069, Dresden, Germany

    Ralph Sueptitz, Kristina Tschulik, Christian Becker, Mihai Stoica, Margitta Uhlemann, Jürgen Eckert & Annett Gebert

Authors
  1. Ralph Sueptitz
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Kristina Tschulik
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Christian Becker
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Mihai Stoica
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Margitta Uhlemann
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Jürgen Eckert
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Annett Gebert
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Ralph Sueptitz.

Additional information

Address all correspondence to this author. This author was an editor of this journal during the review and decision stage. For the JMR policy on review and publication of manuscripts authored by editors, please refer to http://www.mrs.org/jmr-editor-manuscripts/

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Sueptitz, R., Tschulik, K., Becker, C. et al. Micropatterning of Fe-based bulk metallic glass surfaces by pulsed electrochemical micromachining. Journal of Materials Research 27, 3033–3040 (2012). https://doi.org/10.1557/jmr.2012.347

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/jmr.2012.347