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Size effects on deformation mechanism of nanopillars by FIB-CVD using double-cantilever testing

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Abstract

Nanopillars and nanocoils fabricated by chemical vapor deposition using a focused ion beam were used to estimate bending and torsional rigidities under infinitesimal deformation and to investigate nonlinear large deformation behaviors. For the pillars, we performed bending tests using a unique double-cantilever specimen, which was made by joining two pillars together using focused electron beam deposition in a scanning electron microscope. The reproducible load-deflection curves, which were not severely disturbed by the ambiguous chuck condition of the specimens, indicated that the pillar deformation resistance decreased after the linear response (called softening), and it was dependent on the pillar diameter and the ratio of diameter to length. However, all pillars became extremely hardened at large deformation. At diameters of less than 300 nm, and at diameter/length ratios of over 10−2, this nanopillar size effect (characterized as softening) was consistently observed.

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References

  1. H.W. Koops, J. Kretz, M. Rudolph, M. Weber, G. Dahm, and L. Lee: Characterization and application of materials grown by electron-beam-induced deposition Jpn. J. Appl. Phys. Part 1 33, 7099 (1994).

    Article  CAS  Google Scholar 

  2. P.C. Hoyle, J.R. Cleaver, and H.J. Ahmed: Electron beam induced deposition from W(CO)6 at 2 to 20 keV and its applications J. Vac. Sci. Technol. B 14, 662 (1999).

    Article  Google Scholar 

  3. A.J. DeMarco and J.J. Melngailis: Lateral growth of focused ion beam deposited platinum for stencil mask repair J. Vac. Sci. Technol. B 17, 3154 (1999).

    Article  CAS  Google Scholar 

  4. S. Matsui, K. Kaito, J. Fujita, M. Komura, K. Kanda, and Y. Haruyama: Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition J. Vac. Sci. Technol. B 18, 3181 (2000).

    Article  CAS  Google Scholar 

  5. Y. Shibutani and T. Yoshioka: Inleastic deformation of nanopillar by focused-ion-beam chemical vapor deposition J. Vac. Sci. Technol. B 26, 201 (2008).

    Article  CAS  Google Scholar 

  6. H. Tanaka, M. Shinkai, Y. Shibutani, and Y. Kogo: Nonlinear large deflection of nanopillars fabricated by focused ion-beam induced chemical vapor deposition using double-cantilever testing J. Vac. Sci. Technol. B 27, 2161 (2009).

    Article  CAS  Google Scholar 

  7. J. Fujita, M. Ishida, T. Ichihashi, Y. Ochiai, T. Kaito, and S. Matsui: Growth of three-dimensional nano-structures using FIB-CVD and its mechanical properties Nucl. Instrum. Methods Phys. Res. B 206, 472 (2003).

    Article  CAS  Google Scholar 

  8. M. Nishio, S. Sawaya, S. Akita, and Y. Nakayama: Density of electron-beam-induced amorphous carbon deposits J. Vac. Sci. Technol. B 23, 1975 (2005).

    Article  CAS  Google Scholar 

  9. X. Chen, S. Zhang, D.A. Dikin, W. Ding, R.S. Ruoff, L. Pan, and Y. Nakayama: Mechanics of a carbon nanocoil Nano Lett. 3, 1299 (2003).

    Article  CAS  Google Scholar 

  10. J.M. Gere and S.P. Timoshenko: Mechanics of Materials, 3rd ed. (PWS Publishing Comp, Boston, 1990), pp. 514, 517.

    Google Scholar 

  11. R. Kometani, K. Yusa, S. Warisawa, and S. Ishihara: Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition J. Vac. Sci. Technol. B 28, C6F38 (2010).

    Article  CAS  Google Scholar 

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Acknowledgments

The author (YS) deeply acknowledges the support from the Center for Atomic and Molecular Technologies of Osaka University, and the coauthor (YK) acknowledges the support from the Polyscale Technology Research Center of Tokyo University of Science.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Osaka University, Suita, Osaka, 565-0871, Japan

    Yoji Shibutani & Takuya Nakano

  2. Department of Mechanical Engineering, University of Tokyo, Bunkyo, Tokyo, 113-8656, Japan

    Hiro Tanaka & Yasuo Kogo

Authors
  1. Yoji Shibutani
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  2. Takuya Nakano
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  3. Hiro Tanaka
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  4. Yasuo Kogo
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Correspondence to Yoji Shibutani.

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Shibutani, Y., Nakano, T., Tanaka, H. et al. Size effects on deformation mechanism of nanopillars by FIB-CVD using double-cantilever testing. Journal of Materials Research 27, 521–527 (2012). https://doi.org/10.1557/jmr.2011.344

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  • DOI: https://doi.org/10.1557/jmr.2011.344

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