Abstract
Reliable and cost-effective techniques to process surface nanoscale metallic structures with controllable and complex nanomorphologies is important toward progress in technologies related to sensing, energy harvesting, information storage, and computing. Here we discuss how pulsed laser melting and the ensuing self-organization by dewetting of ultrathin films can be utilized to fabricate various nanomorphologies in a predictable manner. Ultrathin metal films (1–100 nm) on inert substrates like SiO2 are generally unstable, with their free energy resembling that of a spinodal system. The energy rate theory of self-organization, which is based on balancing the rate of thermodynamic free energy change to the rate of energy dissipation, predicts the appearance of characteristic length scales. This is borne out in experiments of nanosecond pulsed laser melting of a variety of metal films. We review this laser-based self-organization technique with various examples from the behavior of Ag and Co metals on SiO2 substrates. Specifically, film thickness and film roughness can be used to control dewetting length scales, whereas knowledge of the intermolecular forces responsible for the free energy of the system control the type of morphology. Furthermore, novel dewetting is observed that is attributable to nanoscale heating effects resulting from the thickness-dependent pulsed laser heating. These results help elucidate the basic mechanisms of pulsed laser induced dewetting of metal films, but they also provide potential routes for cost-effective nanomanufacturing of metallic surfaces for applications in sensing, energy harvesting, and information processing.
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M.A. Meyers, A. Mishra, and D.J. Benson: Mechanical properties of nanocrystalline materials. Prog. Mater. Sci. 51, 427–556 (2006).
K.L. Kelly, E. Coronado, L.L. Zhao, and G.C. Schatz: The optical properties of metal nanoparticles: The influence of size, shape, and dielectric environment. J. Phys. Chem. 107, 668–677 (2003).
Y. Xia and J.N. Halas: Synthesis and surface plasmonic properties of metallic nanostructures. MRS Bull. 30, 338 (2005).
S. Maier, P.G. Kik, and H.A. Atwater: Observation of couple plasmon–polariton modes in Au nanoparticle chain waveguide of different length: Estimation of waveguide losses. Appl. Phys. Lett. 81, 1714–16 (2002).
D.L. Leslie-Pelecky and R.D. Rieke: Magnetic properties of nanostructured materials. Chem. Mater. 8, 1770–1783 (1996).
C. Kittel: Rev. Mod. Phys. 21, 541 (1949).
C. Kittel: Phys. Rev. 70 965 (1946).
J.B. González-Díaz, A. García-Martín, J.M. García-Martín, A. Cebollada, G. Armelles, B. Sepílveda, Y. Alaverdyan, and M. Káll: Plasmonic AU/CO/AU nanosandwiches with enhanced magneto-optical activity. Small. 4, 202–205 (2008).
K. Drexler: Molecular engineering: An approach of the development of general capabilities for molecular manipulation. Nat. Acad. of Sci. 78, 5275–5278 (1981).
K. Drexler and J.S. Foster: Synthetic tips. Nature 343, 600–604 (1990).
H. Gleiter: Nanostructured materials: Basic concepts and microstructure. Acta. Mater. 48, 1–29 (2000).
K. Inomata and Y. Saito: Spin-dependent tunneling through layered ferromagnetic nanoparticles. Appl. Phys. Lett. 73, 1143–1145 (1998).
J. Stahl, M. Debe, and P. Coleman: Enhanced bioadsorption characteristics of a uniquely nanostructured thin film. J. Vac. Sci. Techno. A, 14, 1761–1764 (1996).
D. Shtanski, S. Kulinich, E. Levashov, and J. Moore: Structure and physical–mechanical properties of nanostructured thin films. Phys. Solid. State. 45, 1177–1184 (2003).
M. Quinten, A. Leitner, J. Krenn, and F. Aussenegg: Electromagnetic energy transport via linear chains of silver nanoparticles. Opt. Lett. 23, 1331 (1998).
K. Willets and R.P. Van Duyne: Localized surface plasmon resonance spectroscopy and sensing. Annu. Rev. Phys. Chem. 58, 267 (2007).
M. Fleischmann, P.J. Hendra, and A. MacQuillan: Raman spectra of pyridine adsorbed at a silver electrode. Chem. Phys. Lett. 26, 163–168 (1974).
S.Y. Chou, P.R. Krauss, and L. Kong: J. Appl. Phys. 79, 6101 (1996).
R.M.H. New, R.F.W. Pease, and R.L. White: J. Vac. Sci. Technol. B 12, 3196 (1994).
P.R. Krauss, P.B. Fischer, and S.Y. Chou: J. Vac. Sci. Technol. B 12, 3639 (1994).
S.Y. Chou, P.R. Krauss, and P.J. Renstrom: J. Vac. Sci. Technol. B 14, 4129 (1996).
M. Todorovic, S. Schuttz, J. Wong, and A. Scherer: Appl. Phys. Lett. 74, 2516 (1999).
M. Salerno, J.R. Krenn, B. Lamprecht, G. Schider, H. Ditlbacher, N. Felidj, A. Leitner, and F.R. Aussenegg: Opto-Electron. Rev. 10, 217 (2002).
R.S. Molday and D. Mackenzie: J. Immunol. Methods 52, 353 (1982).
A. Jordan, R. Scholz, P. Wust, H. Schirra, T. Schiestel, H. Schmidt, and R. Felix: J. Magn. Magn. Mater. 194, 185 (1999).
F. Ross, J. Tersoff, and R. Tromp: Coarsening of self-assembled Ge quantum dots on Si(001). Phys. Rev. Lett. 80, 984–19 (1998).
S. Kondo and R. Asal: A reaction-diffusion wave on the skin of the marine angelfish Pomacanthus. Nature 376, 765–768 (1993).
C. Favazza, R. Kalyanaraman, and R. Sureshkumar: Robust nanopatterning by laser-induced dewetting of metal nanofilms. Nanotechnology 17, 4229–42 (2006).
A. Ashton, A. Brad Murray, and O. Arnault: Formation of coastline features by large-scale instabilities induced by high-angle waves. Nature, 414, 296–300 (2001).
A. Vrij: Possible mechanism for the spontaneous rupture of thin, free liquid films. Discuss. Faraday Soc. 42, 23–27 (1966).
A. Vrij and J.T.G. Overbeek: Rupture of thin liquid films due to spontaneous fluctuations in thickness. J. Am. Chem. Soc. 90, 3074–30 (1968).
G. Reiter: Phys. Rev. Lett. 68, 75 (1992).
J-U. Thiele, L. Folks, M.F. Toney, and D.K. Weller: Perpendicular magnetic anisotropy and magnetic domain structure in sputtered epitaxial fept (001) l1[sub 0] films. J. Appl. Phys. 84, 5686–5692 (1998).
T. Stange and D. Evans: Nucleation and growth of defects leading to dewetting of thin polymer films. Langmuir 13, 4459–4465 (1997).
U. Thiele, M.G. Velarde, and K. Neuffer: Dewetting: film rupture by nucleation in the spinodal regime. Phys. Rev. Lett. 87, 16104 (2001).
A. Sharma and R. Khanna: Pattern formation in thin liquid films. Phys. Rev. Lett. 80,(1998).
A. Sharma and E. Ruckenstein: J. Colloid Interface Sci. 106, 12 (1985).
A. Sharma and E. Ruckenstein: Finite-amplitude instability of thin free and wetting films: prediction of lifetimes. Langmuir 2, 480–494 (1986).
R. Pretorius, J. Harris, and M-A. Nicolet: Reaction of thin metal films with SiO2 substrates. Solid. State. Electron. 21, 667–675 (1978).
L.H. Ho, T. Nguyen, J.C. Chang, B. Machesney, and P. Geiss: Evidence of Co/SiO2 reaction during rapid thermal annealing. Mater. Res. 8, 467–472 (1993).
C. Favazza, R. Kalyanaraman, and R. Sureshkumar: Dynamics of ultrathin metal films on amorphous substrates under fast thermal processing. J. Appl. Phys. 102, 104308 (2007).
X. Hu, D. Cahill, and R. Averback: Nanoscale pattern formation in Pt thin films due to ion-beam-induced dewetting. Appl. Phys. Lett. 76, 3215–32 (2000).
X. Hu, D.G. Cahill, and R.S. Averback: Dewetting and nanopattern formation of thin Pt films on SiO2 induced by ion beam irradiation. J. Appl. Phys., 89, 7777–7783, (2001).
J. Bischof, M. Reimmuth, J. Boneberg, H. Herminghaus, T. Palberg, and P. Leiderer: In Proceedings of SPIE. 2777, 1996; p. 119
S. Herminghaus, K. Jacobs, K. Mecke, J. Bischof, A. Fery, M. Ibn-Elhaj, and S. Schlagowski: Spinodal dewetting in liquid crystal and liquid metal films. Science, 282, 916–919 (1998).
S.J. Henley, J.D. Carey, and S.R.P. Silva: Pulsed-laser-induced nanoscale island formation in thin metal-on-oxide films. Phys. Rev. B 72, 195408–I–195408–10 (2005).
C. Favazza, J. Trice, A. Gangopadhyay, H. Garcia, R. Sureshkumar, and R. Kalyanaraman: Nanoparticle ordering by dewetting of Co on SiO2. J. Electron. Mater., 35, 1618–20 (2006).
C. Favazza, J. Trice, H. Krishna, R. Kalyanaraman, and R. Sureshkumar: Laser-induced short- and long-range ordering of Co nanoparticles on SiO2. Appl. Phys. Lett. 88, 1531181–1531183 (2006).
C. Favazza, J. Trice, R. Kalyanaraman, and R. Sureshkumars: Self-organized metal nanostructures through laser-interference driven thermocapillary convection. Appl. Phys. Lett. 91, 043105 (2007).
J. Trice, C. Favazza, D. Thomas, H. Garcia, R. Kalyanaraman, and R. Sureshkumar: Novel self-organization mechanism in ultrathin liquid films: Theory and experiment. Phys. Rev. Lett., 101, 017802 (2008).
H. Krishna, C. Miller, L. Longstreth-Spoor, Z. Nussinov, A.K. Gangopadhyay, and R. Kalyanaraman: Unusual size-dependent magnetization in near hemispherical Co nanomagnets on sio2 from fast pulsed laser processing. J. Appl. Phys. 103, 073902 (2008).
H. Krishna, J. Strader, A.K. Gangopadhyay, R. Kalyanaraman: Nanosecond laser-induced synthesis of nanoparticles with tailorable magnetic anisotropy, J. Mag. Mag. Mat., 323, p 356–362 (2011).
J.W. Cahn: Phase separation by spinodal decomposition in isotropic systems. J. Chem. Phys. 62, 93–99 (1965).
J. Israelachvili: Intermolecular and Surface Forces. (Academic Press, London, 1992).
V.A. Parsegians: Van der Waals Forces: A Handbook for Biologists, Chemists, Engineers, and Physicists (Cambridge University Press, 2006), New York.
H. Krishna, R. Sachan, J. Strader, C. Favazza, M. Khenner, and R. Kalyanaraman: Thickness-dependent spontaneous dewetting morphology of ultrathin Ag films. Nanotechnology, 21, (2010).
A. Sharma: Relationship of thin film stability and morphology to macroscopic parameters of wetting in the apolar and polar systems. Langmuir, 9, 861–869 (1993).
R. Seemann, S. Herminghaus, and K. Jacobs: Dewetting patterns and molecular forces. Phys. Rev. Lett. 86, 5534–5537 (2001).
J. Becker, G. Grun, R. Seeman, H. Mantz, K. Jacobs, K. Mecke, and R. Blossey: Complex dewetting scenarios captured by thin-film models. Nat. Mater. 2, 59 (2003).
J. Trice, R. Kalyanaraman, and R. Sureshkumar: Computational modeling of laser-induced self-organization in nanoscopic metal films for predictive nanomanufacturing. In Instrumentation, Metrology, and Standards for Nanomanufacturing M.T. Postek and J.A. Allgair, eds. Proceedings of SPIE, p 6648, SPIE, New York, 2007 p. 66480K.
P. de Gennes, F. Brochard-Wyart, and D. Quere: Capillarity and Wetting Phenomena: Drops, Bubbles, Pearls, Waves (Springer, New York, 2004).
H. Krishna, N. Shirato, C. Favazza, and R. Kalyanaraman: Energy driven self-organization in nanoscale metallic liquid films. Phys. Chem. Chem. Phys. 11, 8136–8143 (2009).
P.-G. de Gennes: The dynamics of a spreading droplet. C.R. Acad. Paris, 298, 111–115 (1984).
L. Kondic: Instabilitites in gravity driven flow of thin fluid films. SIAM Rev. 45, 95–115 (2003).
N. Shirato, H. Krishna, R. Kalyanaraman: Thermodynamic model for the dewetting instability in ultrathin films. J. Appl. Phys. 108, 024313 (2010).
J. Trice, D. Thomas, C. Favazza, R. Sureshkumar, and R. Kalyanaraman: Investigation of laser-induced dewetting in nanoscopic Co films: Experiments and modeling of thermal behavior. Phys. Rev. B 75, 235439 (2007).
G. Reiter: Unstable thin polymer films: Rupture and dewetting processes. Langmuir 9, 1344–1351 (1993).
R. Xie, A. Karim, J. Douglas, C. Han, and R. Weiss: Spinodal dewetting of thin polymer films. Phys. Rev. Lett. 81, 1251–1254 (1998).
R. Seemann, S. Herminghaus, and K. Jacobs: Gaining control of pattern formation of dewetting liquid films. J. Phys. Condensi. Matter. 13, 4925–4938 (2001).
V. Mitlin: On dewetting conditions. Colloids Surf. A 89, 97–101 (1994).
L. Maissel and R. Glang, eds: Handbook of Thin FilmTechnology, (McGraw–Hill, New York, 1970); Chap. 8.
O.S. Heavens: Optical Properties of Thin Solid. (Butterworth, New York, 1955); pp. 76–77.
C.L. Yaws, ed.: Chemical Properties Handbook (McGraw–Hill, New York, 1999).
H.M. Lu and Q. Jiang: Surface tension and its temperature coefficient for liquid metals. J. Phys. Chem. B 109, 15463–15468 (2005).
ACKNOWLEDGMENTS
The authors acknowledge support from the National Science Foundation (CAREER Grant DMI- 0449258, Grant NSF-CMMI-0855949, Grant NSF-DMR-0856707) and the Center for Materials Innovation at Washington University. The third author also acknowledges discussions with Dr. Trice, and Dr. Strader and Prof. Garcia, Prof. Sureshkumar, and Prof. Khenner.
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Krishna, H., Shirato, N., Favazza, C. et al. Pulsed laser induced self-organization by dewetting of metallic films. Journal of Materials Research 26, 154–169 (2011). https://doi.org/10.1557/jmr.2010.17
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DOI: https://doi.org/10.1557/jmr.2010.17