Skip to main content
SpringerLink
Log in

Enhanced hardness of CrAlSiN/W2N superlattice coatings deposited by direct current magnetron sputtering

  • Article
  • Published:
Journal of Materials Research Aims and scope Submit manuscript

Abstract

CrAlSiN/W2N nanolayered coatings were prepared by direct current magnetron sputtering. The modulation periods of multilayer coatings were controlled in the range from 3 to 20 nm. From the low angle x-ray diffraction and high angle x-ray diffraction (XRD) satellite peaks, the superlattice structure of these coatings was evidenced. The modulation periods of multilayer coatings were obtained precisely by the low angle XRD and high angle XRD satellite peaks methods. The detailed layered structure was further investigated by high-resolution transmission electron microscopy. Because of the dense and smooth nanolayered microstructure, the CrAlSiN/WaN multilayer films exhibited excellent microhardness. With an appropriate modulation period of 8 nm, the hardness reached a maximum around 40 GPa. The hardness enhancement is attributed to the large lattice mismatch and strengthening of superlattice structure, which is confirmed by XRD and transmission electron microscopy.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. K. Polychronopoulou, M.A. Baker, C. Rebholz, J. Neidhardt, M. O’sullivan, A.E. Reiter, K. Kanakis, A. Leyland, A. Matthews, and C. Mitterer: The nanostructure, wear and corrosion performance of arc-evaporated CrBxNy nanocomposite coatings. Surf. Coat. Technol. 204, 246 (2009).

    CAS  Google Scholar 

  2. J.L. Mo and M.H. Zhu: Tribological characterization of chromium nitride coating deposited by filtered cathodic vacuum arc. Appl. Surf. Sci. 255, 7627 (2009).

    CAS  Google Scholar 

  3. F.B. Wu, J.J. Lee, and J.G. Duh: Evaluation of the mechanical properties and tribological behavior of the CrN coating deposited on mild steel modified with electroless Ni interlayer. Thin Solid Films 377, 354 (2000).

    Google Scholar 

  4. P.H. Mayrhofer, G. Tischler, and C. Mitterer: Microstructure and mechanical/thermal properties of Cr-N coatings deposited by reactive unbalanced magnetron sputtering. Surf. Coat. Technol. 142, 78 (2001).

    Google Scholar 

  5. M. Kawate, A.K. Hashimoto, and T. Suzuki: Oxidation resistance of Cr1-xAlxN and Ti1_xAlxN films. Surf. Coat. Technol. 165, 163 (2003).

    CAS  Google Scholar 

  6. F.B. Wu, S.K. Tien, J.W. Lee, and J.G. Duh: Comparison in microstructure and mechanical properties of nanocomposite CrWN and nanolayered CrN/WN coatings. Surf. Coat. Technol. 200(10), 3194(2006)

    CAS  Google Scholar 

  7. K.P. Purushofham, L.P. Ward, N. Brack, P.J. Pigram, P. Evans, H. Noorman, and R.R. Manory: Wear behavior of CrN coatings MEVVA ion implanted with Zr. Wear 257, 901 (2004).

    Google Scholar 

  8. C. Ducros, V. Benevent, and F. Sanchette: Deposition, characterization and machining performance of multilayer PVD coatings on cemented carbide cutting tools. Surf. Coat. Technol. 163, 681 (2003).

    Google Scholar 

  9. M.S. Wong, G.Y. Hsiao, and S.Y. Yang: Preparation and characterization of AIN/ZrN and AlN/TiN nanolaminate coatings. Surf. Coat. Technol. 133, 160 (2000).

    Google Scholar 

  10. Y.Z. Tsai and J.G. Duh: Thermal stability and microstructure characterization of CrN/WN multilayer coatings fabricated by ion-beam-assisted deposition. Surf. Coat. Technol. 200, 1683 (2005).

    CAS  Google Scholar 

  11. Y.Z. Tsai and J.G. Duh: Tribological behavior of CrN/WN multilayer coatings grown by ion-beam-assisted deposition. Surf. Coat. Technol. 201, 4266 (2006).

    CAS  Google Scholar 

  12. J-W. Lim, S.H. Lee, and J-J. Lee: Preparation and properties of nanoscale multilayered TiN/AIN coatings deposited by plasma enhanced chemical vapor deposition. Surf. Coat. Technol. 169, 460 (2003).

    Google Scholar 

  13. G.S. Kim, S.Y. Lee, J.H. Hahn, and S.Y. Lee: Synthesis of CrN/ A1N superlattice coatings using closed-field unbalanced magnetron sputtering process. Surf. Coat. Technol. 171, 91 (2003).

    CAS  Google Scholar 

  14. S.H. Kim, Y.J. Baik, and D. Kwon: Analysis of interfacial strengthening from composite hardness of TiN/VN and TiN/NbN multilayer hard coatings. Surf. Coat. Technol. 187, 47 (2004).

    CAS  Google Scholar 

  15. E. Bemporad, C. Pecchio, S. De Rossi, and F. Carassiti: Characterization and wear properties of industrially produced nanoscaled CrN/NbN multilayer coating. Surf. Coat. Technol. 188, 319 (2004).

    Google Scholar 

  16. X. Chu and S.A. Barnett: Model of superlattice yield stress and hardness enchancements. J. Appl. Phys. 77, 4403 (1995).

    CAS  Google Scholar 

  17. S.K. Tien, C.H. Lin, Y.Z. Tsai, and J.G. Duh: Effect of nitrogen flow on the properties of quaternary CrAlSiN coatings at elevated temperatures. Surf. Coat. Technol. 202, 735 (2007).

    CAS  Google Scholar 

  18. W.C. Oliver and G.M. Pharr: An improved technique for determining hardness and elastic-modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992).

    CAS  Google Scholar 

  19. G.Y. Li, Z.H. Han, J.W. Tian, J.H. Xu, and M.Y. Gu: Alternating stress field and superhardness effect in TiN/NbN superlattice films. J. Vac. Sci. Technol.. A 20, 674 (2002).

    CAS  Google Scholar 

  20. E.E. Fullerton, I.K. Schuller, H. Vanderstraeten, and Y. Bruynseraede: Structural refinement of superlattices from x-ray-diffraction. Phys. Rev. B 45, 9292 (1992).

    CAS  Google Scholar 

  21. P.C. Yashar and W.D. Sproul: Nanometer scale multilayered hard coatings. Vacuum 55, 179 (1999).

    CAS  Google Scholar 

  22. G. Abadias, Y.Y. Tse, A. Michael, C. Jaouen, and M. Jaouen: Nanoscaled composite TiN/Cu multilayer thin films deposited by dual ion beam sputtering: Growth and structural characterization. Thin Solid Films 433, 166 (2003).

    CAS  Google Scholar 

  23. H.C. Barshilia, A. Jain, and K.S. Rajam: Structure, hardness and thermal stability of nanolayered TiN/CrN multilayer coatings. Vacuum 72, 241 (2004).

    Google Scholar 

  24. M. Shinn, L. Hultman, and S.A. Barnett: Growth, structure, and microhardness of epitaxial TiN/NbN superlattices. J. Mater. Res. 7, 901 (1992).

    CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Material Science and Engineering, National Tsing-Hua University, Hsinchu 300, Taiwan

    Y. Z. Tsai & J. G. Duh

Authors
  1. Y. Z. Tsai
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. G. Duh
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to J. G. Duh.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Tsai, Y.Z., Duh, J.G. Enhanced hardness of CrAlSiN/W2N superlattice coatings deposited by direct current magnetron sputtering. Journal of Materials Research 25, 2325–2329 (2010). https://doi.org/10.1557/jmr.2010.0296

Download citation

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/jmr.2010.0296

Search

Navigation