Abstract
Replication of metallic high-aspect-ratio microscale structures (HARMS) by compression molding has been demonstrated recently. Molding replication of metallic HARMS can potentially lead to low-cost fabrication of a wide variety of metal-based microdevices. Understanding the mechanics of metal micromolding is critical for assessing the capabilities and limitations of this replication technique. This paper presents results of instrumented micromolding of Al. Measured molding response was rationalized with companion high-temperature tensile testing of Al using a simple mechanics model of the micromolding process. The present results suggest that resisting pressure on the mold insert during micromolding is governed primarily by the yield stress of the molded metal at the molding temperature and a frictional traction on the sides of the insert. The influence of strain rate is also considered.
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ACKNOWLEDGMENTS
J. Jiang, W.J. Meng, and G.B. Sinclair gratefully acknowledge partial project support from the National Science Foundation through Grant Nos. DMI-0400061 and DMI-0556100. W.J. Meng and J. Jiang also gratefully acknowledge additional support from Louisiana Board of Regents through Contract No. LEQSF(2004-07)-RD-B-06. The research work at Oak Ridge National Laboratory was sponsored by the Assistant Secretary for Energy Efficiency and Renewable Energy, Office of FreedomCAR and Vehicle Technology Program, as part of the High Temperature Materials Laboratory User Program, Oak Ridge National Laboratory, managed by UT-Battelle, LLC, for the United States Department of Energy under Contract No. DE-AC05-00OR22725. Technical assistance in high-temperature testing by C.O. Stevens and D.B. Glanton is also gratefully acknowledged.
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Jiang, J., Meng, W., Sinclair, G. et al. Further experiments and modeling for microscale compression molding of metals at elevated temperatures. Journal of Materials Research 22, 1839–1848 (2007). https://doi.org/10.1557/jmr.2007.0252
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DOI: https://doi.org/10.1557/jmr.2007.0252