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Microelectronics Processing: Inorganic Materials Characterization Edited by Lawrence Casper (American Chemical Society, 1986)
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Reviewers: Charles A. Evans Jr. is co-founder and president of Charles Evans & Associates, an analytical laboratory specializing in state-of-the art surface and thin-film microanalysis primarily for the semiconductor industry. Steven W. Novak is a staff analyst/SIMS at Charles Evans & Associates.
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Evans, C.A., Novak, S.W. Microelectronics Processing: Inorganic Materials Characterization Edited by Lawrence Casper. MRS Bulletin 12, 106 (1987). https://doi.org/10.1557/S0883769400067373
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DOI: https://doi.org/10.1557/S0883769400067373