Abstract
Fundamental principles and experimental procedures for fully utilizing the power of Auger analysis are discussed. Topics include: quantitative analysis, high resolution imaging, depth profiling, and noise reduction. These studies reveal several improvements that might be expected in the immediate future and how they might be achieved. Some knowledge of Auger spectroscopy is assumed, but references on theory, principles, instrumentation, and applications are cited.
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References
C.C. Chang, J. Vac. Sci. Technol. 18(2) (1981) p. 276.
C.C. Chang, in Characterization of Solid Surfaces, edited by P.F. Kane and G.B. Larrabee (Plenum, New York, 1974) Chapter 20.
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Chang, C.C. Advances in Analytical Auger Electron Spectroscopy. MRS Bulletin 12, 70–74 (1987). https://doi.org/10.1557/S0883769400067269
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DOI: https://doi.org/10.1557/S0883769400067269