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Ion Beam Deposition, Film Modification and Synthesis

  • Deposition Processes
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Authors
  1. S. M. Rossnagel
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  2. J. J. Cuomo
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Rossnagel, S.M., Cuomo, J.J. Ion Beam Deposition, Film Modification and Synthesis. MRS Bulletin 13, 40–45 (1988). https://doi.org/10.1557/S0883769400063685

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