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Evaporation Processes

  • Deposition Processes
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Conclusions

We have reviewed theory and practice of the evaporation-based processes for synthesizing thin and thick films. The ability of these processes to deposit films at high rates and with excellent control of their structure and properties is likely to be a driving factor in their future development for industrial applications.

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Authors
  1. R. F. Bunshah
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  2. C. V. Deshpandey
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Bunshah, R.F., Deshpandey, C.V. Evaporation Processes. MRS Bulletin 13, 33–39 (1988). https://doi.org/10.1557/S0883769400063673

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