Skip to main content
SpringerLink
Log in

Metalorganic Deposition (MOD): A Nonvacuum, Spin-on, Liquid-Based, Thin Film Method

  • Technical Features
  • Published:
MRS Bulletin Aims and scope Submit manuscript

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. J.V. Mantese, A.H. Hamdi, A.L. Micheli, Y.L. Chen, C.A. Wong, J.L. Johnson, M.M. Karmarkar, and K.R. Padmanabhan, Appl. Phys. Lett. 52 (1988) p. 1631.

    Article  CAS  Google Scholar 

  2. A.H. Hamdi, J.V. Mantese, A.L. Micheli, R.C.O. Laugal, D.F. Dungan, Z.H. Zhang, and K.R. Padmanabhan, Appl. Phys. Lett. 51 (1987) p. 2152.

    Article  CAS  Google Scholar 

  3. T. Maruyama and K. Kitamura, Jpn. J. Appl. Phys. 28 (1989) p. L312.

    Article  CAS  Google Scholar 

  4. G.M. Vest and R.W. Vest, Intl. J. Hybrid Micro. 2 (1982) p. 62.

    Google Scholar 

  5. C.J. Sabo, G.M. Vest, S. Singaram, and D. Mis, Proc. Intl. Soc. Hybrid Micro. Symp., Nov. 11-14, Anaheim, CA 59 (1985).

  6. R.W. Vest and J. Xu, JEEE Trans. UFFC 35 (1988) p. 711.

    Article  CAS  Google Scholar 

  7. J. Xu, A.S. Shaikh, and R.W. Vest, Thin Solid Films 161 (1988) p. 273.

    Article  CAS  Google Scholar 

  8. J.J. Xu, A.S. Shaikh, and R.W. Vest, IEEE Trans. UFFC 36 (1989) p. 307.

    Article  CAS  Google Scholar 

  9. A.H. Hamdi, J.V. Mantese, A.L. Micheli, R.A. Waldo, Y.L. Chen, C.A. Wong, M.M. Karmarkar, and K.R. Padmanabhan, J. Mater. Res. 3 (1988) p. 1311.

    Article  Google Scholar 

  10. A.H. Hamdi, J.V. Mantese, A.L. Micheli, R.A. Waldo, Y.L. Chen, and C.A. Wong, Appl. Phys. Lett. 53 (1988) p. 435.

    Article  CAS  Google Scholar 

  11. Strem Chemicals, Newburyport, MA.

  12. Engelhard Industries, Newark, NJ.

  13. G.M. Vest and S. Singaram, in Defect Properties and Processing of High-Technology Nonmetallic Materials, edited by Y. Chen, W.D. Kingery, and R.J. Stokes (Mat. Res. Soc. Proc. 60, Pittsburgh, PA, 1986) p. 35.

  14. D.R. Gaskell, Introduction to Metallurgical Thermodynamics, 2nd Ed. (McGraw-Hill, New York, 1981) p. 286–292.

    Google Scholar 

  15. I. Matsuba and K. Matsumota, IEEE Trans. on Elec. Dev. 33 (1986) p. 1263.

    Article  Google Scholar 

  16. J.V. Mantese, A.B. Catalan, A.H. Hamdi, and A.L. Micheli, Appl. Phys. Lett. 52 (1988) p. 1741.

    Article  CAS  Google Scholar 

  17. L.T. Harriot, K.D. Cummings, M.E. Gross, and W.L. Brown, Appl. Phys. Lett. 49 (1986) p. 1661.

    Article  Google Scholar 

  18. Y. Ohmura, T. Shiokawa, K. Toyoda, and S. Namba, Appl. Phys. Lett. 51 (1987) p. 1500.

    Article  CAS  Google Scholar 

  19. J.V. Mantese, A.B. Catalan, A.M. Mance, A.H. Hamdi, A.L. Micheli, J.A. Sell, and M.S. Meyer, Appl. Phys. Lett. 53 (1988) p. 1335.

    Article  CAS  Google Scholar 

  20. T. Krauss, A. Speth, M.M. Oprysko, B. Fan, and K. Grebe, Appl. Phys. Lett. 53 (1988) p. 947.

    Article  CAS  Google Scholar 

  21. K.W. Beeson and N.S. Clements, Appl. Phys. Lett. 53 (1988) p. 547.

    Article  CAS  Google Scholar 

  22. M.E. Gross, A. Appelbaum, and P.K. Gallagher, J. Appl. Phys. 61 (1987) p. 1628.

    Article  CAS  Google Scholar 

  23. A. Gupta and R. Jagannathan, Appl. Phys. Lett. 51 (1987) p. 2254.

    Article  CAS  Google Scholar 

  24. J.V. Mantese, A.B. Catalan, A.H. Hamdi, A.L. Micheli, and K. Studer-Rabeler, Appl. Phys. Lett. 53 (1988) p. 526.

    Article  CAS  Google Scholar 

  25. H.G. Craighead and L.M. Schiavone, Appl. Phys. Lett. 48 (1986) p. 1748.

    Article  CAS  Google Scholar 

  26. A.J. Serafino, R.J. Coyle. G.L. Wolk, R.F. Doll, Semi. Int. 132 (June 1988).

  27. M.E. Gross, G.J. Fisanick, P.K. Gallagher, K.J. Schnoes, and M.D. Fennell, Appl. Phys. Lett. 47 (1985) p. 923.

    Article  CAS  Google Scholar 

  28. G.J. Fisanick, M.E. Gross, J.B. Hopkins, M.D. Fennell, K.J. Schnoes, and A. Katzir, J. Appl. Phys. 57 (1985) p. 1139.

    Article  CAS  Google Scholar 

  29. A.L. Micheli, S. Chang, and D.B. Hicks, Ceram. Eng. Sci. Proc. 8 (1987) p. 1095.

    CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. University of Missouri, Columbia, USA

    J. V. Mantese BS in physics

  2. Cornell University, Ithaca, USA

    J. V. Mantese BS in physics

  3. Electrical and Electronics Engineering Department, General Motors Research Laboratories, University of Illinois, Champaign, USA

    A. L. Micheli (Senior staff research scientist)

  4. New York State College of Ceramics, Alfred Station, USA

    A. L. Micheli (Senior staff research scientist)

  5. Mosul University in Ninavah, Ninavah, Iraq

    A. H. Hamdi BS in physics

  6. Salford University, Manchester, England

    A. H. Hamdi BS in physics

  7. North Texas State University, Denton, USA

    A. H. Hamdi BS in physics

  8. Purdue University, West Lafayette, USA

    R. W. Vest BS in chemistry

  9. Iowa State University, Ames, USA

    R. W. Vest BS in chemistry

Authors
  1. J. V. Mantese BS in physics
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. L. Micheli
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. H. Hamdi BS in physics
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. R. W. Vest BS in chemistry
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Mantese, J.V., Micheli, A.L., Hamdi, A.H. et al. Metalorganic Deposition (MOD): A Nonvacuum, Spin-on, Liquid-Based, Thin Film Method. MRS Bulletin 14, 48–53 (1989). https://doi.org/10.1557/S0883769400061492

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/S0883769400061492

Search

Navigation