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Multilayer Optics for the Soft X-Ray and Extreme Ultraviolet

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Conclusion

Multilayer x-ray optics and instrumentation are now mature enough to be both an enabling science/technology as well as areas of scientific investigation in their own right. The results presented here demonstrate the vitality and interdisciplinary character of this work. The promise that was held for SXR and EUV multilayer optics is now coming to fruition and many of the advanced optic Systems envisioned in the late 1970s are becoming reality. It should be clear that the current state of this field is based on the science and technology of multilayer microstructures that enables materials engineering at the atomic level. Both traditional and new experimental approaches based on these optics will be developed in the next decade. The novelty of multilayer VUV and soft x-ray optics will pass, but not their usefulness.

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  1. Troy W. Barbee Jr.
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Barbee, T.W. Multilayer Optics for the Soft X-Ray and Extreme Ultraviolet. MRS Bulletin 15, 37–44 (1990). https://doi.org/10.1557/S0883769400060449

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