Summary
We have indicated that high Tc superconducting films can be fabricated in many ways and discussed e-beam and sputter deposition as two promising examples. In order to use these films in most electronics applications, pattern processes have been developed and linewidths to below 2 µm are consistently achieved. Initial applications of these films include SQUIDs, transmission lines, and tunnel junction studies.
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Laibowitz, R.B. High Tc Superconducting Thin Films. MRS Bulletin 14, 58–62 (1989). https://doi.org/10.1557/S0883769400053926
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DOI: https://doi.org/10.1557/S0883769400053926