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Electroless Cu for VLSI

  • Copper Metallization
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Authors
  1. James S. H. Cho
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  2. Ho-Kyu Kang
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  3. S. Simon Wong
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  4. Yosi Shacham-Diamand
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Cho, J.S.H., Kang, HK., Simon Wong, S. et al. Electroless Cu for VLSI. MRS Bulletin 18, 31–38 (1993). https://doi.org/10.1557/S0883769400047308

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