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Copper-Based Metallization for ULSI Applications

  • Copper Metallization
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Authors
  1. Jian Li
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  2. Robert Blewer
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  3. J. W. Mayer
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Li, J., Blewer, R. & Mayer, J.W. Copper-Based Metallization for ULSI Applications. MRS Bulletin 18, 18–21 (1993). https://doi.org/10.1557/S088376940004728X

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  • DOI: https://doi.org/10.1557/S088376940004728X

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