References
Thin Films: Papers Presented at a Seminar of the American Society of Metals, edited by H.G.F. Wilsdorf (American Society of Metals, 1964).
Thin Films: Stresses and Mechanical Properties, edited by J.C. Bravman, W.D. Nix, D.M. Barnett, and D.A. Smith (Mater. Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989).
“Mechanical Properties of Thin Films,” Nix W.D., Metall. Trans. 20A (1989) p. 2217.
Thin Films: Stresses and Mechanical Properties II, edited by M. Doerner, W.C. Oliver, G.M. Pharr, and F.R. Brotzen, (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1992).
Materials Reliability Issues in Microelectronics, edited by J.R. Lloyd, P.S. Ho, C.T. Sah, and F.G. Yost (Mater. Res. Soc. Symp. Proc. 225, Pittsburgh, PA, 1991).
Mechanical Behavior of Materials and Structures in Microelectronics, edited by E. Suhir, R.C. Cammarata, D.D.L. Chung, and M. Jono (Mater. Res. Soc. Symp. Proc. 226, Pittsburgh, PA, 1991).
Thin Films: Stresses and Mechanical Properties III, edited by W.D. Nix, J.C. Bravman, E. Arzt, and L.B. Freund (Mater. Res. Soc. Symp. Proc. 239, Pittsburgh, PA, 1992).
Rights and permissions
About this article
Cite this article
Mechanical Behavior of Thin Films. MRS Bulletin 17, 25–27 (1992). https://doi.org/10.1557/S0883769400041622
Published:
Issue Date:
DOI: https://doi.org/10.1557/S0883769400041622