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Fundamental Concepts of Ion-Solid Interactions: Single Ions, 10−12 Seconds

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References

  1. L. Lindhard, M. Scharff, and H.E. Schiott, Kgl. Dan. Vid. Selsk. Mat. fys. Medd. 33 (14) (1963).

  2. J.W. Mayer, L. Eriksson, and J.A. Davies, Ion Implantation in Semiconductors (Academic Press, New York, 1970), Tables 2.1–2.6 and related text.

    Google Scholar 

  3. K.B. Winterbon, iIon Implantation Range and Energy Distributions, Vol. 2, Low Energy (Plenum Press, New York, 1975).

    Google Scholar 

  4. J.P. Biersack and L.G. Haggemark, Nucl. Instrum. Methods 174 (1980) p. 257; also, W.G. Eckstein and J.P. Biersack, Appl. Phys. A37 (1985) p. 95 and A38 (1985) p. 123.

    Article  CAS  Google Scholar 

  5. J. Lindhard, Kgl. Dan. Vid. Selsk. Mat. fys. Medd. 34 (14) (1965).

  6. J. Lindhard, V. Nielsen, M. Scharff, and P.V. Thompsen, Kgl. Dan. Vid. Selsk. Mat. fys. Medd. 33 (10) (1963).

  7. E.L. Haines and A.B. Whitehead, Rev. Sci. Instrum. 37 (1966) p. 190.

    Article  CAS  Google Scholar 

  8. P. Sigmund, App Phys. Lett. 14 (1969) p. 114.

    Article  CAS  Google Scholar 

  9. K.B. Winterbon, P. Sigmund, and J.B. Sanders, Kgl. Dan. Vid. Selsk. Mat. fys. Medd. 37 (14) (1970).

  10. R.S. Walker and D.A. Thompson, Radiat. Eff. 37 (1978) p. 113.

    Article  CAS  Google Scholar 

  11. D.A. Thompson, Radiat. Eff. 56 (1981) p. 105.

    Article  CAS  Google Scholar 

  12. P. Sigmund, Appl. Phys. Lett. 25 (1974) p. 169; plus an erratum in 27 (197) p. 52.

    Article  Google Scholar 

  13. G. Carter and D.G. Armour, Thin Solid Films 80 (1981) p. 13; also the earlier work of E.V. Kornelsen, Can. J. Phys. 42 (1964) p. 364.

    Article  CAS  Google Scholar 

  14. E.V. Kornelsen, Radiat. Eff. 13 (1972) p. 227.

    Article  CAS  Google Scholar 

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  1. J. A. Davies
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Davies, J.A. Fundamental Concepts of Ion-Solid Interactions: Single Ions, 10−12 Seconds. MRS Bulletin 17, 26–29 (1992). https://doi.org/10.1557/S0883769400041427

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