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Ion-Assisted Processing of Electronic Materials

  • Ion-Assisted Processing of Electronic Materials
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Authors and Affiliations

  1. Dielectric Research Department, AT&T Bell Laboratories, Murray Hill, New Jersey, USA

    Walter L. Brown (Guest Editor)

  2. Microphysics Research Department, Bell Labs, Murray Hill, USA

    Abbas Ourmazd (Guest Editor)

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  1. Walter L. Brown
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  2. Abbas Ourmazd
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Brown, W.L., Ourmazd, A. Ion-Assisted Processing of Electronic Materials. MRS Bulletin 17, 23–25 (1992). https://doi.org/10.1557/S0883769400041415

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  • DOI: https://doi.org/10.1557/S0883769400041415

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