References
A.E. Pyne and P.C. Newman, Inst. Phys. Conf. Ser. 74 (1985) p. 7.
Semiconductor International (October 1991) p. 27.
N. Kato, MS thesis, Massachusetts Institute of Technology, 1991.
J. Gladstone, 1988 IEEE MTT-S Digest, p. 93.
A. Prabhakar and S.A. Roosild, Inst. Phys. Conf. Ser. 112 (1990) p. 25.
R. Cates, Spectrum (Apr. 1990) p. 25.
J. Mikkelson, 1991 Int. Electron Dev. Meeting, p. 231.
D.R. Decker, in VLSI Electronics, Microstructure Science, Vol. 11: GaAs Microelectronics, edited by N.G. Einspruch and W.R. Wisseman (Academic Press, London, 1985) p. 87.
S.T. Shapiro, MS thesis, Massachusetts Institute of Technology, 1991.
D.C. D’Avanzo, D.B. Estreich, T.W. Taylor, H. Kondoh, J. Orr, A. Quach, E.H. Wong, R. Yeats, V.K. Makker, and R.A. Fischer, in Proceedings of GaAs IC Symposium (IEEE, New York, 1988) p. 317.
P.W. Moran, MS thesis, Massachusetts Institute of Technology, 1990.
P.W. Moran, S.S. Elliott, N. Wylie, R.M. Henderson, and J.A. del Alamo, IEEE Trans. Semicond. Manuf. 4 (4) (1991) p. 304.
P.W. Moran, J.A. del Alamo, N. Wylie, R.M. Henderson, and S. Elliott, Proceedings of IEEE/ SEMI Advanced Semiconductor Manufacturing Conference (IEEE, New York, 1990) p. 136A.
T.H. Becker, MS thesis, Massachusetts Institute of Technology, 1991.
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del Alamo, J.A. GaAs Integrated Circuit Manufacturing. MRS Bulletin 17, 42–44 (1992). https://doi.org/10.1557/S0883769400041063
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DOI: https://doi.org/10.1557/S0883769400041063