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Physical Properties of SiO2 and Its Interface to Silicon in Microelectronic Applications

  • Materials Reliability in Microelectronics
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Authors
  1. Werner Weber
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  2. Martin Brox
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Weber, W., Brox, M. Physical Properties of SiO2 and Its Interface to Silicon in Microelectronic Applications. MRS Bulletin 18, 36–42 (1993). https://doi.org/10.1557/S0883769400039063

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