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In Situ Observations of Misfit Dislocations in Lattice-Mismatched Epitaxial Semiconductor Heterostructures

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References

  1. “Strained Layer Superlattices” in Semiconductors and Semimetals, Volumes 32 and 33, edited by T.P. Pearsall (Academic Press, New York, 1991).

  2. C.W. Snyder, B.G. Orr, D. Kessler, and L.M. Sander, Phys. Rev. Lett. 66 (1991) p. 3032.

    Article  CAS  Google Scholar 

  3. A.T. Fiory, J.C. Bean, R. Hull, and S. Nakahara, Phys. Rev. B 31 (1985) p. 4063.

    Article  CAS  Google Scholar 

  4. F.C. Frank and J.H. van der Merwe, Proc. R. Soc. London, Ser. A 198 p. 205; 198 ibid. p. 216; 200 p. 125 (1949).

    Article  CAS  Google Scholar 

  5. J.W. Matthews and A.E. Blakeslee, J. Cryst. Growth 27 (1974) p. 118; 29 (1975) p. 273; 32 (1976) p. 265.

    CAS  Google Scholar 

  6. J.C. Bean, L.C. Feldman, A.T. Fiory, S. Nakahara, and I.K. Robinson, J. Vac. Sci. Technol. A 2 (1984) p. 436.

    Article  CAS  Google Scholar 

  7. E. Kasper, H-J. Herzog, and H. Kibbel, Appl. Phys. 8 (1975) p. 199.

    Article  CAS  Google Scholar 

  8. M.L. Green, B.E. Weir, D. Brasen, Y.F. Hsieh, G. Higashi, A. Feygenson, L.C. Feldman, and R.L. Headrick, J. Appl. Phys. 69 (1991) p. 745.

    Article  CAS  Google Scholar 

  9. I.J. Fritz, Appl. Phys. Lett. 51 (1987) p. 1080.

    Article  CAS  Google Scholar 

  10. B.W. Dodson and J.Y. Tsao, Appl. Phys. Lett. 51 (1987) p. 1325.

    Article  CAS  Google Scholar 

  11. R. Hull, J.C. Bean, D.J. Werder, and R.E. Leibenguth, Phys. Rev. B 40 (1989) p. 1681.

    Article  CAS  Google Scholar 

  12. Gatan, Inc., 780 Commonwealth Drive, Warrendale, PA 15086.

  13. R. Hull, J.C. Bean, and C. Buescher, J. Appl. Phys. 66 (1989) p. 5837.

    Article  CAS  Google Scholar 

  14. R. Hull and J.C. Bean, J. Vac. Sci. Technol. A 7 (1989) p. 2580.

    Article  CAS  Google Scholar 

  15. R. Hull and J.C. Bean, Appl. Phys. Lett. 54 (1989) p. 925.

    Article  CAS  Google Scholar 

  16. R. Hull, J.C. Bean, J.M. Bonar, G.S. Higashi, K.T. Short, H. Temkin, and A.E. White, Appl. Phys. Lett. 56 (1990) p. 2445.

    Article  CAS  Google Scholar 

  17. R. Hull, J.C. Bean, D. Bahnck, L.J. Peticolas, K.T. Short, and E.C. Unterwald, J. Appl. Phys. 70 (1991) p. 2052.

    Article  CAS  Google Scholar 

  18. R. Hull and J.C. Bean, Phys. Status Solidi A 138 (1993) p. 533.

    Article  CAS  Google Scholar 

  19. R. Hull, J.C. Bean, L.J. Peticolas, and D. Bahnck, Appl. Phys. Lett. 59 (1991) p. 964.

    Article  CAS  Google Scholar 

  20. R. Hull and J.C. Bean, Critical Rev. Solid State Mater. Sci. 17 (1992) p. 507.

    Article  CAS  Google Scholar 

  21. E.M. Ross, R. Hull, D. Bahnck, J.C. Bean, L.J. Peticolas, and C.A. King, Appl. Phys. Lett. 62 (1993) p. 1426.

    Article  Google Scholar 

  22. See A. George and J. Rabier, Rev. Phys. Appl. 22 (1987) p. 1941 for a review.

    Article  Google Scholar 

  23. J.P. Hirth and J. Lothe, Theory of Dislocations (McGraw-Hill, New York, 1968).

    Google Scholar 

  24. C.G. Tuppen and C.J. Gibbings, J. Appl. Phys. 68 (1990) p. 1526.

    Article  CAS  Google Scholar 

  25. Y. Yamashita, K. Maeda, K. Fujita, N. Usami, K. Suzuki, S. Fukatsu, Y. Mera, and Y Shiraki, Philos. Mag. Lett. 67 (1993) p. 165.

    Article  CAS  Google Scholar 

  26. D.C. Houghton, J. Appl. Phys. 70 (1991) p. 2136.

    Article  CAS  Google Scholar 

  27. W.A. Nix, D.B. Noble, and J.E. Turlo, in Thin Films: Stresses and Mechanical Properties II, edited by M. Doerner, W.C. Oliver, G.M. Pharr, and F.R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990) p. 315.

  28. S.M. Sze, Physics of Semiconductor Devices, 2nd ed., (Wiley & Sons, New York, 1981).

    Google Scholar 

  29. Constructed in conjunction with Gatan, Inc., 780 Commonwealth Drive, Warrendale, PA 15086.

  30. C. Bull, P. Ashburn, G.R. Booker, and K.H. Nicholas, Solid State Electronics 22 (1979) p. 95.

    Article  CAS  Google Scholar 

  31. R. Hull, Appl. Phys. Lett. 63 (1993) p. 2291.

    Article  CAS  Google Scholar 

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Hull, R., Bean, J. In Situ Observations of Misfit Dislocations in Lattice-Mismatched Epitaxial Semiconductor Heterostructures. MRS Bulletin 19, 32–37 (1994). https://doi.org/10.1557/S0883769400036721

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  • DOI: https://doi.org/10.1557/S0883769400036721

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