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Ferroelectric Thin Films in Microelectromechanical Systems Applications

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References

  1. A.B. Frazier, R.O. Warrington, and C. Fredrich, IEEE Trans. Ind. Electron. 42 (1995) p. 423.

    Article  Google Scholar 

  2. D.L. Polla, Microelectronic Engin. 29 (1995) p. 51.

    Article  CAS  Google Scholar 

  3. L. O’Connor, Mech. Engin. (May 1993) p. 62.

    Google Scholar 

  4. W.B. Scott, Aviation Week and Space Technol. (March 1, 1993) p. 36.

    Google Scholar 

  5. B. Jaffe, W.R. Cook, and H. Jaffe, Piezoelectric Ceram. (R.A.N. Publishers, Marietta, OH, 1971).

    Google Scholar 

  6. C. Ye, T. Tamagawa, P. Schiller, and D.L. Polla, Sensors and Actuators A35 (1992) p. 77.

    Article  CAS  Google Scholar 

  7. M. Sayer, C.V.R. Vasant Kumar, D. Barrow, L. Zou, and D.T. Amm, in Ferroelectric Thin Films II, edited by A.I. Kingon, E.R. Myers, and B. Tuttle (Mater. Res. Soc. Symp. Proc. 243, Pittsburgh, 1992) p. 39.

  8. P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K. Brooks, N. Setter, and R. Luthier, Sensors and Actuators A48 (1995) p. 157.

    Article  CAS  Google Scholar 

  9. A.M. Flynn, L.S. Tavrow, S.F. Bart, R.A. Brooks, D.H. Ehrlich, K.R. Udayakumar, and L.E. Cross, J. Microelectromech. Sys. 1 (1992) p. 44.

    Article  Google Scholar 

  10. C.C. Hsueh, T. Tamagawa, C. Ye, A. Helgeson, and D.L. Polla, Integrated Ferroelectrics 3 (1993) p. 21.

    Article  CAS  Google Scholar 

  11. K. Sreenivas, I. Reaney, T. Maeder, N. Setter, C. Jagadish, and R.G. Elliman, J. Appl. Phys. 75 (1994) p. 232.

    Article  CAS  Google Scholar 

  12. T.G. Cooney, D.E. Glumac, W.P. Robbins, and L.F. Francis, in Ferroelectric Thin Films IV, edited by B.A. Tuttle, S.B. Desu, R. Ramesh, and T. Shiosaki (Mater. Res. Soc. Symp. Proc. 361, Pittsburgh, 1995) p. 401.

  13. J.S. Wright, J.M. Schwartz, L.D. Schmidt, and L.F. Francis, J. Am. Ceram. Soc. 78 (1995) p. 2360.

    Article  CAS  Google Scholar 

  14. S.D. Berstein, T.Y. Wong, Y. Kisler, and R.W. Tustison, J. Mater. Res. 8 (1993) p. 13.

    Google Scholar 

  15. B.A. Tuttle and R.W. Schwartz, MRS Bulletin 21 (6) (1996).

    Google Scholar 

  16. K.D. Budd, S.K. Dey, and D.A. Payne, Br. Ceram. Proc. 36 (1985) p. 107.

    CAS  Google Scholar 

  17. C.T. Lin, B.W. Scanlan, J.D. McNeill, J.S. Webb, L. Li, R.A. Lipeles, P.M. Adams, and M.S. Leung, J. Mater. Res. 7 (1992) p. 2546.

    Article  CAS  Google Scholar 

  18. T.G. Cooney and L.F. Francis, J. Micromech. Microeng. (to be published).

  19. P. Schiller and D.L. Polla, 7th Int. Conf. Solid-State Sensors and Actuators (Yokohama, Japan, June 1993).

    Google Scholar 

  20. B. Blow, D.L. Polla, R. Harjani, and T. Tamagawa, IEEE VLSI Circuits Symposium, May 1993; J-H. Kim, L. Wang, L. Li, S. Zurn, and D.L. Polla, Proc. 8th Int. Symp. Integrated Ferroelectrics (Phoenix, AZ, March 1996).

    Google Scholar 

  21. E.S. Kim and R.S. Muller, IEEE Electron Dev. Lett. EDL-8 (1987) p. 467; R.P. Reid, E.S. Kim, D.M. Hong, and R.S. Muller, J. Microelectromech. Sys. 2 (1993) p. 111.

    Google Scholar 

  22. D.L. Polla and L.F. Francis, 7th U.S.-Jpn. Seminar Dielectric and Piezoelectric Ceram. (Tsukuba, Japan, November 1995).

    Google Scholar 

  23. D.L. Polla, C. Ye, and T. Tamagawa, Appl. Phys. Lett. 59 (1991) p. 3539.

    Article  CAS  Google Scholar 

  24. C. Ye, T. Tamagawa, P. Schiller, and D.L. Polla, Sensors and Actuators A35 (1992) p. 77.

    Article  CAS  Google Scholar 

  25. L. Pham and D.L. Polla, IEEE Trans. on Ultrason., Ferroelectrics, and Frequency Control, vol. UFFC-41 (1994) p. 552.

    Google Scholar 

  26. W.P. Robbins, “Proc. 7th Int. Symp. Integrated Ferroelectrics,” Integrated Ferroelectrics (1996) in press.

    Google Scholar 

  27. J.W. Judy, D.L. Polla, and W.P. Robbins, IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control, vol. UFFC-37 (1990) p. 428.

    Google Scholar 

  28. D.J. Peichel, D. Markus, K. Rho, and D.L. Polla (unpublished manuscript).

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Authors
  1. D. L. Polla
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  2. L. F. Francis
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Polla, D.L., Francis, L.F. Ferroelectric Thin Films in Microelectromechanical Systems Applications. MRS Bulletin 21, 59–65 (1996). https://doi.org/10.1557/S0883769400035934

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