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Use of Plasma Processing in Making Integrated Circuits and Flat-Panel Displays

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Authors
  1. Richard A. Gottscho
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  2. Maria E. Barone
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  3. Joel M. Cook
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Gottscho, R.A., Barone, M.E. & Cook, J.M. Use of Plasma Processing in Making Integrated Circuits and Flat-Panel Displays. MRS Bulletin 21, 38–42 (1996). https://doi.org/10.1557/S0883769400035697

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  • DOI: https://doi.org/10.1557/S0883769400035697

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