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Plasma Generation for Materials Processing

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References

  1. M.A. Lieberman and A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (John Wiley & Sons, Inc., New York, 1994).

    Google Scholar 

  2. C. Lee and M.A. Lieberman, J. Vac. Sci. Technol. A13 (1995) p. 368.

    Article  CAS  Google Scholar 

  3. J. Asmussen, J. Vac. Sci. Technol. A7 (1989) p. 883.

    Article  CAS  Google Scholar 

  4. R.W. Boswell, Plasma Phys. Controlled Fusion 26 (1970) p. 1147.

    Article  Google Scholar 

  5. F.F. Chen, Plasma Phys. Controlled Fusion 33 (1991) p. 339.

    Article  Google Scholar 

  6. J.M. Cook, D.E. Ibbotson, P.D. Foo, and D.L. Flamm, J. Vac. Sci. Technol. A8 (1990) p. 1820.

    Article  CAS  Google Scholar 

  7. M. Moisan and Z. Zakrzewski, J. Phys. D24 (1991) p. 1025.

    Google Scholar 

  8. A.W. Trivelpiece and R.W. Gould, J. Appl. Phys. 30 (1959) p. 1784.

    Article  Google Scholar 

  9. K. Komachi, J. Vac. Sci. Technol A1 (1992) p. 164.

    Google Scholar 

  10. W. Hittorf, Wiedemanns Ann. Phys. 21 (1884) p. 90.

    Article  Google Scholar 

  11. H.U. Eckert, High Temp. Sci. 6 (1974) p. 99.

    CAS  Google Scholar 

  12. H. Sugai, K. Nakamura, Y. Hikosaka, and M. Nakamura, J. Vac. Sci. Technol. A 13 (1995) p. 887.

    Article  CAS  Google Scholar 

  13. M. Tuszewski and J.A. Tobin, J. Vac. Sci. Technol. A in press.

  14. J.S. Ogle, U.S. Patent No. 4,948,458 (August 14, 1990).

  15. J. Hopwood, C.R. Guarnieri, S.J. Whitehair, and J.J. Cuomo, J. Vac. Sci. Technol. A 11 (1993) p. 147 and p. 152.

    Article  CAS  Google Scholar 

  16. A. von Enge, A.R. Seeliger, and M. Steenbeck, Z. Phys. 85 (1933) p. 144.

    Article  Google Scholar 

  17. T. Yokoyama, M. Kogoma, T. Morikawa, and S. Okazaki, J. Phys. D23 (1990) p. 1125.

    CAS  Google Scholar 

  18. W. Siemens, Ann. Phys. Chem. 102 (1857) p. 66.

    Article  Google Scholar 

  19. D. Evans, L.A. Rosocha, G.K. Anderson, J.J. Coogan, and M.J. Kushner, J. Appl. Phys. 74 (1993) p. 5378.

    Article  CAS  Google Scholar 

  20. I.G. Brown, Rev. Sci. Instrum. 65 (1994) p. 3061.

    Article  CAS  Google Scholar 

  21. R.P. Hoyt, J.T. Scheuer, K.F. Schoenberg, R.A. Gerwin, R.W. Moses Jr., and I. Henins, IEEE Trans. Plasma Sci. 23 (1995) p. 481.

    Article  Google Scholar 

  22. M. Dalvie, M. Surendra, G.S. Selwyn, and C.R. Guarnieri, Plasma Sources Sci. Technol. 3 (1994) p. 442.

    Article  CAS  Google Scholar 

  23. G.S. Selwyn, Semicond. Int. 3 (1993) p. 72.

    Google Scholar 

  24. G.S. Selwyn, J.E. Heidenreich, and K.L. Haller, J. Vac. Sci. Technol. A 9 (1991) p. 2817.

    Article  CAS  Google Scholar 

  25. To view several photographs of trapped particle clouds, access the world-wide-web at the following address: http://harry.lanl.gov/bpw/contamination.html.

  26. R.N. Carlile, S.G. Geha, J.F. O’Hanlon, and J.C. Stewart, Appl Phys. Lett. 67 (1991) p. 1167.

    Article  Google Scholar 

  27. G.S. Selwyn and E.F. Patterson, J. Vac. Sci. Technol. A 10 (1992) p. 1053.

    Article  CAS  Google Scholar 

  28. G.S. Selwyn, K.L. Haller, and E.F. Patterson, J. Vac. Sci. Technol. A 11 (1993) p. 1132.

    Article  CAS  Google Scholar 

  29. G.S. Selwyn and A.D. Bailey III, J. Vac. Sci. Technol. A 14 (1996) p. 649.

    Article  CAS  Google Scholar 

  30. G.S. Selwyn, Jpn. J. Appl Phys. 32 (1993) p. 3068.

    Article  CAS  Google Scholar 

  31. G.S. Selwyn, patent pending (1996).

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Authors
  1. M. A. Lieberman
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  2. G. S. Selwyn
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  3. M. Tuszewski
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Lieberman, M.A., Selwyn, G.S. & Tuszewski, M. Plasma Generation for Materials Processing. MRS Bulletin 21, 32–37 (1996). https://doi.org/10.1557/S0883769400035685

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