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Fluorinated Amorphous Carbon as a Low-Dielectric-Constant Interlayer Dielectric

  • Low-Dielectricconstant Materials
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References

  1. A.E. Fering, B.C. Auman, and E.R. Wonchoba, Macromolecules 26 (1993) p. 2779.

    Google Scholar 

  2. T.C. Nason, J.A. Moore, and T.M. Lu, Appl. Phys. Lett. 60 (1992) p. 1866.

    Google Scholar 

  3. S.F. Hahn, S.J. Martin, M.L. Mckelvy, and D.W. Patrick, Macromolecules 26 (1993) p. 3870.

    Google Scholar 

  4. H. Yasuda, Plasma Polymerization (Academic, New York, 1985).

    Google Scholar 

  5. K. Endo and T. Tatsumi, J. Appl. Phys. 78 (1995) p. 1370.

    Google Scholar 

  6. Proc. DUMIC Conf., edited by S. Takeishi, H. Kudo, R. Shinohara, M. Hoshino, S. Fukuyama, J. Yamaguchi, and Y. Yamada (San Jose, CA, 1996) p. 71.

    Google Scholar 

  7. S.J. Limb, C.B. Labelle, K.K. Gleason, D.J. Edell, and E.F. Gleason, Appl. Phys. Lett. 68 (1996) p. 2810.

    Google Scholar 

  8. T.W. Mountsier and D. Kumar, presented at Symposium H, Materials Research Society Meeting, Boston, 1996.

    Google Scholar 

  9. A. Grill, V. Patel, S.A. Cohen, D.C. Edelstein, J.R. Paraszczak, and C. Jahnes, Ibid.

    Google Scholar 

  10. K. Endo and T. Tatsumi, Appl. Phys. Lett. 68 (1996) p. 2864.

    Google Scholar 

  11. J.A. Theil, F. Mertz, M. Yairi, K. Seaward, G. Ray, and G. Kooi, presented at Symposium N, Materials Research Society Meeting, San Francisco, 1997.

    Google Scholar 

  12. W.W. Lee, G. Tyndall, and M. Crowder, presented at the Adv. Metall. and Intercon. Sys. for ULSI Appl. Portland, OR, 1995.

    Google Scholar 

  13. S.A. Robles, L. Vasquez, M. Eizenberg, and F. Moghadam, presented at Symposium N, Materials Research Society Meeting, San Francisco, 1997.

    Google Scholar 

  14. K. Endo, T. Tatsumi, and Y. Matsubara, Jpn. J. Appl. Phys. 35 (1996) p. L1348.

    Google Scholar 

  15. K. Machida and H. Oikawa, J. Vac. Sci. Technol. B 4 (1986) p. 818.

    Google Scholar 

  16. T. Mogami, M. Morimoto, H. Okabayashi, and E. Nagasawa, Ibid. (1985) p. 857.

    Google Scholar 

  17. R. d’Agostino, F. Cramarossa, and F. Illuzzi, J. Appl. Phys. 61 (1987) p. 2754.

    Google Scholar 

  18. Y. Matsubara, K. Endo, T. Tatsumi, H. Ueno, K. Sugai, and T. Horiuch, IEDM Tech. Digest (1996) p. 369.

    Google Scholar 

  19. K. Endo, T. Tatsumi, and Y. Matsubara, Appl. Phys. Lett. 70 (1997) p. 1078.

    Google Scholar 

  20. K.L. Smith and K.M. Black, J. Vac. Sci. Technol. A 2 (1984) p. 744.

    Google Scholar 

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Authors
  1. Kazuhiko Endo
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Endo, K. Fluorinated Amorphous Carbon as a Low-Dielectric-Constant Interlayer Dielectric. MRS Bulletin 22, 55–58 (1997). https://doi.org/10.1557/S0883769400034217

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