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Phase-Separated Inorganic-Organic Hybrids for Microelectronic Applications

  • Low-Dielectricconstant Materials
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Authors
  1. R. D. Miller
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  2. J. L. Hedrick
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  3. D. Y. Yoon
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  4. R. F. Cook
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  5. J. P. Hummel
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Miller, R.D., Hedrick, J.L., Yoon, D.Y. et al. Phase-Separated Inorganic-Organic Hybrids for Microelectronic Applications. MRS Bulletin 22, 44–48 (1997). https://doi.org/10.1557/S0883769400034199

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  • DOI: https://doi.org/10.1557/S0883769400034199

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