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Nanoporous Silica as an Ultralow-k Dielectric

  • Low-Dielectricconstant Materials
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Authors
  1. Changming Jin
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  2. J. D. Luttmer
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  3. Douglas M. Smith
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  4. Teresa A. Ramos
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Jin, C., Luttmer, J.D., Smith, D.M. et al. Nanoporous Silica as an Ultralow-k Dielectric. MRS Bulletin 22, 39–42 (1997). https://doi.org/10.1557/S0883769400034187

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  • DOI: https://doi.org/10.1557/S0883769400034187

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