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References
M. Yanagisawa and K. Komaki, New Diamond (Japanese) 38 (1995) p. 34.
K. Tanaka, T. Yashiki, T. Nakamura, Y. Kumazawa, N. Fujimori, T. Nakai, and N. Urakawa, Sumitomo Elec. Tech. Rev. 33 (1992) p. 136.
T. Iguchi, K. Harano, K. Tanaka, Y. Kumazawa, H. Shiomi, T. Tuno, and N. Fujimori, ibid. 51 (1997) p. 113.
K. Tanabe and N. Fujimori, New Diamond 6 (1990) p. 26.
M. Nagai, Y. Yamamoto, K. Tanabe, Y. Kumazawa, and N. Fujimori, in Proc. Int. Symp. on Microelectronics, vol. 302 (The International Microelectronics and Packaging Society, 1997).
G. Lu and L.K. Bigelow, Diamond Rel. Mater. 1 (1992) p. 34.
H. Sakae, H. Aoyagi, M. Oura, H. Kimura, T. Ohta, H. Kimura, T. Shiwaku, S. Yamamoto, H. Sugiyama, K. Tanabe, K. Kobashi, and H. Kitamuro, J. Synchrotron Radiat 4 (1997) p. 204.
H. Nakahata, A. Hachigo, S. Shikata, and N. Fujimori, in Proc. IEEE Ultrasonics Conf., vol. 377 (Institute of Electrical and Electronics Engineers, 1992).
S. Shikata, H. Nakahata, A. Hachigo, and N. Fujimori, Diamond Rel. Mater. 2 (1993) p. 1197
S. Shikata, H. Nakahata, K. Higaki, A. Hachigo, N. Fujimori, Y. Yamamoto, N. Sakairi, and Y. Takahashi, in Proc. IEEE Ultrasonics Conf., vol. 277 (Institute of Electrical and Electronics Engineers, 1993).
H. Nakahata, K. Higaki, S. Fujii, A. Hachigo, S. Shikata, and N. Fujimori, EEE Trans. Ultrason. Ferroelec. Freq. Contr. 42 (1995) p. 362.
S. Fujii, Y. Seki, K. Yoshida, H. Nakahata, K. Higaki, H. Kitabayashi, and S. Shikata, in iEEE Ultrasonics Symp. (Toronto, 1997) p. 183.
H. Nakahata, H. Kitabayashi, S. Fujii, K. Higaki, K. Tanabe, Y. Seki, and S. Shikata, ibid. (San Antonio, 1996) p. 285.
K. Higaki, H. Nakahata, H. Kitabayashi, S. Fujii, K. Tanabe, Y. Seki, and S. Shikata, iEEE Trans. Ultrason. Ferroelec. Freq. Contr. 44 (1997)p. 1395.
S. Koizumi, H. Ozeki, M. Kamo, Y. Sato, and T. Inuzuka, Appl. Phys. Lett. 71 (1997) p. 1064.
H. Shiomi, Y. Nishibayashi, N. Toda, and S. Shikata, iEEE Electron Device Lett. 16 (1995) p. 36.
A. Hokazono and H. Kawarada, Jpn. J. Appl. Phys. A36 (1997) p. 7133.
H. Kawarada, M. Itoh, and A. Hokazono, ibid. 35 (1996) p. L1165.
M. Deguchi, N. Hase, M. Kitabatake, H. Kotera, S. Shima, and H. Sakakima, in 5th Int. Conf. on New Diamond Technolology and Science, vol. 16 (Elsevier Science, 1997) p. 2.
K.E. Goodson and M. Touzelbaev, in 8th European Conf. on Diamond, Diamond-Like Carbon and Related Materials, paper No. 13.1 (MYU.KK, Tokyo.)
F.J. Himpsel, J.A. Knapp, J.A. van Vechten, and D.E. Eastman, Phys. Rev. B 20 (1979) p. 624.
M.W. Geis, J.A. Gregory, and B.B. Pate, iEEE Trans. Electron Dev. 38 (1991) p. 619.
K. Okano, S. Koizumi, S.R.P. Silva, and G.A.J. Amaratunga, Nature 381 (1996) p. 140.
M.F. Ravet, A. Gicquel, E. Anger, Z.Z. Wang, Y. Chen, and F. Rousseaux, in 2nd Int. Conf. on Appl. Diamond Films and Related Materials, Omiya, vol. 77 (1993).
A. Nishiyama, H. Yamashita, H. Yoshikawa, H. Yabe, K. Kitamura, and K. Marumoto, in 5th Int. Conf. on New Diamond Technology and Science, vol. 11 (Elsevier Science, 1997) p. 133.
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Shikata, S. The Road to Commercialization of Vapor-Phase-Grown Diamond. MRS Bulletin 23, 61–64 (1998). https://doi.org/10.1557/S0883769400029390
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DOI: https://doi.org/10.1557/S0883769400029390