References
J. Wilks and E. Wilks, Properties and Applications of Diamond (Butterworth-Heinemann, Oxford, 1991).
J.E. Field, Ed., The Properties of Natural and Synthetic Diamond (Academic Press, London, 1992).
R.F. Davis, Ed., Diamond Films and Coatings (Noyes Publications, Park Ridge, NJ, 1993).
A. Lettington and J.W. Steeds, eds., Thin Film Diamond (Chapman & Hall, London, 1994).
K.E. Spear and J.P. Dismukes, eds., Synthetic Diamond (John Wiley & Sons, New York, 1994).
M.A. Prelas, G. Popovici, and L.K. Bigelow, eds., Handbook of Industrial Diamonds and Diamond Films (Marcel Dekker, New York, 1998).
J.C. Angus, in Synthetic Diamond, Chapter 2, edited by K.E. Spear and J.P. Dismukes (John Wiley & Sons, New York, 1994) p. 21.
D.V. Fedoseev, ibid. Chapter 3, p. 41.
N. Setaka, ibid. Chapter 4, p. 57.
See multiple papers on the hot-filament microwave plasma and direct-current arc-jet plasma-driven deposition of diamond films in the following: S. Saito, O. Fukunaga, and M. Yoshikawa, eds., Proc. 1st Int. Conf. on New Diamond Science and Technology (KTK Scientific/Terra Scientific, Tokyo, 1988)
A.R. Badzian and R.C. DeVries, Mater. Res. Bull. 23 (1988) p. 385.
P.E. Pehrsson, F.G. Celii, and J.E. Butler, in Diamond Films and Coatings, Chapter 3, edited by R.F. Davis (Noyes Publications, Park Ridge, NJ, 1993) p. 68.
H.R. Thorsheim and J.E. Butler, in Synthetic Diamond, Chapter 7, edited by K.E. Spear and J.P. Dismukes (John Wiley & Sons, New York, 1994) p. 193.
D.G. Goodwin and J.E. Butler, in Handbook of Industrial Diamonds and Diamond Films, Chapter 11, edited by M.A. Prelas, G. Popovici, and L.K. Bigelow (Marcel Dekker, New York, 1998) p. 527.
J.E. Butler and R.L. Woodin, Philos. Trans. R. Soc. London 342 (1993) p. 209.
P.K. Bachmann, in Handbook of Industrial Diamonds and Diamond Films, Chapter 21, edited by M.A. Prelas, G. Popovici, and L.K. Bigelow (Marcel Dekker, New York, 1998) p. 821.
R.E. Clausing, ibid. Chapter 2, p. 19.
J.E. Butler, B.D. Thorns, M. McGonigal, J.N. Russell, Jr., and P.E. Pehrsson, “Hydrogen Chemistry on Diamond Surfaces,” in “Wide Band-Gap Electronic Materials,” NATO Meeting/NATO ASI Series Volume 3/1, Proc. NATO Advanced Workshop on Wide Band-Gap Semiconductors, edited by M.A. Prelas, P. Gielisse, G. Popovic, B.V. Spitsyn, and T. Stacy (Kluwer Academic Publishers, Dordrecht, Netherlands, 1995)p. 105.
M.P. D’Evelyn, in Handbook of Industrial Diamonds and Diamond Films, Chapter 4, edited by M.A. Prelas, G. Popovici, and L.K. Bigelow (Marcel Dekker, New York, 1998) p. 89.
A.T. Collins, ibid. Chapter 1, p. 1.
A.M. Zeitsev, ibid. Chapter 7, p. 227.
K. McNamara-Rutledge and K.K. Gleason, ibid. Chapter 9, p. 413.
H. Liu and D.S. Dandy, Diamond Chemical Vapor Deposition (Noyes Publications, Park Ridge, NJ, 1995).
S.J. Harris, Appl. Phys. Lett. 56 (1990) p. 2298.
M.E. Coltrin and D. Dandy, J. Appl. Phys. 74 (1993) p. 5803.
J.C. Angus, in Proc. 1st Int. Symp. on Diamond and Diamond-like Films, edited by J.P. Dismukes, A.J. Purdes, B.S. Meyerson, T.D. Moustakas, K.E. Spear, K.V. Ravi, and M. Yoder (The Electrochemical Society, Pennington, NJ, 1989) p. 1.
D.J. Goodwin, J. Appl. Phys. 74 (1993) p. 6888.
Ibid. p. 6895.
D.E. Patterson, B.J. Bai, C.J. Chu, R.H. Hauge, and J.L. Margrave, in New Diamond Science and Technology, edited by R. Messier, J.T. Glass, J.E. Butler, and R. Roy (Materials Research Society, Pittsburgh, 1991) p. 433.
Y. Hirose, in Proc. 1st Int. Conf on New Diamond Science and Technology, edited by S. Saito, O. Fukunaga, and M. Yoshikawa (KTK Scientific/Terra Scientific, Tokyo, 1988) p. 38.
Y. Hirose and Y. Terasawa, Jpn. J. Appl. Phys. 25 (6) (1986) p. L519.
N.G. Glumac and D.G. Goodwin, Thin Solid Films 212 (1991) p. 122.
D.M. Gruen, S. Liu, A.R. Krauss, J. Luo, and X. Pan, Appl. Phys. Lett. 64 (1994) p. 1502.
D.M. Gruen, C.D. Zuiker, A.R. Krauss, and X. Pan, J. Vac. Sci. Technol. A 13 (1995) p. 1628.
P. Mistry, M.C. Turchan, S. Liu, G.O. Granse, T. Baurmann, and M.G. Shara, innov. Mater. Res. 1 (2) (1996) p. 193.
A. Badzian, B.L. Weiss, R. Roy, T. Badzian, W. Drawl, P. Mistry, and M.C. Turchan, Diamond Rel. Mater, in press.
M. Simpson, Defense Advanced Research Projects Agency Contract No. MDA 972-93-C-0009, Final Report, 1996.
F.G. Celii and J.E. Butler, Appl. Phys. Lett. 54 (1989) p. 1031.
F.G. Celii, H.R. Thorsheim, J.E. Butler, L.S. Piano, and J.M. Pinneo, ibid. 68 (1990) p. 3814.
J.E. Butler, F.G. Celii, D.B. Oakes, L.M. Hanssen, W.A. Carrington, and K.A. Snail, High Temp. Sci. 17 (1990) p. 183.
W. Hsu, Appl. Phys. Lett. 59 (1991) p. 1427.
L.L. Connell, H-N. Chu, J.W. Fleming, D.J. Vestyck, and J.E. Butler, J. Appl. Phys. 79 (6) (1995) p. 3622.
L.R. Martin, ibid. 70 (1991) p. 5667.
P. Fabis and M. Gomes, personal communication, 1996.
K.J. Gray and P.M. Fabis, Diamond Rel. Mater. 6 (1997) p. 191.
D.C. Harris, Report No. NAWCWPNS ’ TP8210 (Naval Air Warfare Center, China Lake, CA, 1992).
Rights and permissions
About this article
Cite this article
Butler, J.E., Windischmann, H. Developments in CVD-Diamond Synthesis During the Past Decade. MRS Bulletin 23, 22–27 (1998). https://doi.org/10.1557/S0883769400029316
Published:
Issue Date:
DOI: https://doi.org/10.1557/S0883769400029316