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Residual Stress Distribution, Intermolecular Force, And Frictional Coefficient Maps In Diamond Films: Processing-Structure-Mechanical Property Relationship

MRS Online Proceedings Library volume 977, Article number: 418 (2006) Cite this article

Abstract

Carbon in its various forms, specifically nanocrystalline diamond, may become a key material for the manufacturing of micro- and nano-electromechanical (M/NEMS) devices in the 21st Century. In order to utilize effectively these materials for M/NEMS applications, understanding of their microscopic structure and physical (mechanical properties, in particular) become indispensable. The micro- and nanocrystalline diamond films were grown using hot-filament and microwave chemical vapor deposition techniques involving novel CH4 / [TMB for boron doping and H2S for sulfur incorporation] in high hydrogen dilution chemistry. To investigate residual stress distribution and intermolecular forces at nanoscale, the films were characterized using Raman spectroscopy and atomic force microscopy in terms of topography, force curves and force volume imaging. Traditional force curve measures the force felt by the tip as it approaches and retracts from a point on the sample surface, while force volume is an array of force curves over an extended range of sample area. Moreover, detailed microscale structural studies are able to demonstrate that the carbon bonding configuration (sp2 versus sp3 hybridization) and surface chemical termination in both the un-doped and doped diamond have a strong effect on nanoscale intermolecular forces. The preliminary information in the force volume measurement was decoupled from topographic data to offer new insights into the materials’s

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Authors and Affiliations

  1. Electrical and Computer Engineering, University of Missouri-Columbia, 6th St. 303 EBW, 65211-2300, Columbia, MO, USA

    Sanju Gupta

  2. Institute of Materials Research, BE-3590, Diepenbeek, Belgium

    Oliver Williams

  3. Physics and Materials Science Department, Missouri State University, 901 S. National Ave., 65987, Springfield, MO, USA

    J. R. Patel

  4. Department of Chemistry, University of Missouri-Rolla, 65409, Rolla, MO, USA

    E. Bohannan

  5. School of Chemistry, University of Bristol, BS8 1TS, Bristol, UK

    W. P. PatelMay

Authors
  1. Sanju Gupta
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  2. Oliver Williams
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  3. J. R. Patel
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  4. E. Bohannan
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  5. W. P. PatelMay
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Gupta, S., Williams, O., Patel, J.R. et al. Residual Stress Distribution, Intermolecular Force, And Frictional Coefficient Maps In Diamond Films: Processing-Structure-Mechanical Property Relationship. MRS Online Proceedings Library 977, 418 (2006). https://doi.org/10.1557/PROC-977-0977-FF04-18

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  • DOI: https://doi.org/10.1557/PROC-977-0977-FF04-18