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Liquid Phase Deposition of Poly(ethylene terephthalate) Films

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Abstract

Poly(ethylene terephthalate), or PET, has been widely used in experiments due to its excellent properties and availability in sheets as thin as 1.5 µm. Its resistance to chemical attack makes PET a good choice as an inert substrate, but makes liquid phase deposition of thin films from solution challenging. Further, attempts to deposit films from the vapor phase have shown limited success. High quality PET films are desirable, as PET is transparent, hydrophobic, amenable to micropatterning, and is well characterized. As such, PET films are suited for use in microdevices. We report on liquid phase deposition of PET films, and on characterization of the films using optical methods.

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Acknowledgments

This research work is supported by the Natural Sciences and Engineering Research Council (NSERC). RMB is supported through an industrial NSERC scholarship administered jointly by Micralyne Inc. and NSERC. The authors would like to thank George Braybrook for taking SEM images. RMB would like to thank James Gospodyn for VASE training.

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Authors and Affiliations

  1. 412 Avadh Bhatia Physics Laboratory, Centre for Nanoscale Physics, Edmonton, Alberta, Canada, T6G 2J1

    Robert M. Bryce & Mark R. Freeman

  2. TRLabs, 7th Floor, 9107 - 116 Street, Edmonton, Alberta, T6G 2V4, Canada

    Hue T. Nguyen & Ray G

  3. Department of Chemistry, University of Alberta, Edmonton, Alberta, Canada, T6G 2G2

    Rik R. Tykwinski

  4. Department of Electrical & Computer Engineering, University of Alberta, Edmonton, Alberta, Canada, T6G 2V4

    Ray G & Ying Y. Tsui

Authors
  1. Robert M. Bryce
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  2. Hue T. Nguyen
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  3. Rik R. Tykwinski
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  4. Ray G
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  5. Mark R. Freeman
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  6. Ying Y. Tsui
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Bryce, R.M., Nguyen, H.T., Tykwinski, R.R. et al. Liquid Phase Deposition of Poly(ethylene terephthalate) Films. MRS Online Proceedings Library 820, 152–157 (2004). https://doi.org/10.1557/PROC-820-O6.6

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  • DOI: https://doi.org/10.1557/PROC-820-O6.6

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