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LS-MOCVD of BSTO Thin Films Using Novel Ba and Sr Precursors

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Abstract

We report the synthesis of new precursors Ba(thd)2(tmeea) and Sr(thd)2(tmeea), where tmeea = tris[2-(2-methoxyethoxy)ethyl]amine, and the LS-MOCVD of barium strontium titanate (BSTO) thin films using these precursors. Thin films of BSTO were grown on Pt(111)/SiO2/Si(100) substrates by LS-MOCVD using the cocktail source consisting of the conventional Ti precursor Ti(thd)2(OiPr)2 and the new Ba and Sr precursors. As-grown films were characterized by SEM, XRD, XRF, and C-V measurement. BSTO films grown at 420°C were stoichiometric barium strontium titanate with very smooth surface morphology and their dielectric constants were found to be as large as 320. The dependence of composition, microstructure and the electrical properties of the BSTO films on the growth temperature, annealing temperature, and working pressure will be discussed.

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References

  1. I. Kobayashi, Y. Wakao K. Tominaga, and M. Okada, Jpn. J. Appl. Phys., 33, 4680 (1994)

    Article  CAS  Google Scholar 

  2. S. B. Turnipseed, R. M. Barkley, and R. E. Sievers, Inorg. Chem., 30, 1164 (1991)

    Article  CAS  Google Scholar 

  3. A. P. Purdy, A. D. Berry, R. T. Holm. M. Fatemi, and D. K. Gaskill, Inorg. Chem., 28, 2799 (1989)

    Article  CAS  Google Scholar 

  4. A. R. Barron and W. S. Rees, Jr., Adv. Mater. Opt. Electron., 2, 271 (1993)

    Article  CAS  Google Scholar 

  5. J. A. Nash, J. C. Barnes, D. J. Cole-Hamilton, B. C. Richards, S. L. Cook, and M. L. Hitehman, Adv. Mater. Opt. Electron., 5, 1 (1995)

    Article  CAS  Google Scholar 

  6. A. J. Panson, R. G. Charles, D. N. Schmidt, J. R. Szedon, G. J. Machiko, and A. I. Braginski, Appl. Phys. Lett., 53, 1756 (1988)

    Article  CAS  Google Scholar 

  7. J.-H. Lee and S.-W. Rhee, J. Electrochem. Soc. 148, C409 (2001)

    Article  CAS  Google Scholar 

  8. S. M. Bilodeau, R. Carl, P. C. Van Buskirk, J. F. Roeder, C. Basceri, S. E. Lash, C. B. Parker, S. K. Streiffer, and A. I. Kingon, J. Kor. Phys. Soc., 32, S1591 (1998)

    CAS  Google Scholar 

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  1. Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology, Daejeon, 305-600, Korea

    Hyun Goo Kwon, Youngwoo Oh, Jung Woo Park, Young Kuk Lee, Chang Gyoun Kim & Yunsoo Kim

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  1. Hyun Goo Kwon
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  2. Youngwoo Oh
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  3. Jung Woo Park
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  4. Young Kuk Lee
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  5. Chang Gyoun Kim
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  6. Yunsoo Kim
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Kwon, H.G., Oh, Y., Park, J.W. et al. LS-MOCVD of BSTO Thin Films Using Novel Ba and Sr Precursors. MRS Online Proceedings Library 765, D322 (2002). https://doi.org/10.1557/PROC-765-D3.22

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  • DOI: https://doi.org/10.1557/PROC-765-D3.22

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