Abstract
We report on the design, fabrication and characterization of solar-blind Schottky photodiodes with high detectivity and low noise. The devices were fabricated on n-/n+ AlGaN/GaN hetero-structures using a microwave compatible fabrication process. Using Al0.38Ga0.62N absorption layer, true solar-blind operation with a cutoff wavelength of ∼274 nm was achieved. The solar-blind detectors exhibited < 400 fA dark current in the 0–25 V reverse bias regime, and a maximum responsivity of 89 mA/W around 267 nm. The photovoltaic detectivity of the devices were in excess of 2.6×1012 cmHz1/2/W, and the detector noise was 1/f limited with a noise power density less than 3×10−29 A2/Hz at 10 KHz.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
P. Schreiber, T. Dang, G. Smith, T. Pickenpaugh, P. Gehred, and C. Litton, Proc. SPIE 3629, 230 (1999).
J. C. Carrano, T. Li, P. A. Grudowski, R. D. Dupuis, and J. C. Campbell, IEEE Circuits amp; Devices Mag. 15, 15 (1999).
D. Walker, X. Zhang, P. Kung, A. Saxler, S. Javapour, J. Xu, and M. Razeghi, Appl. Phys. Lett. 68, 2100 (1996).
B. W. Lim, Q. C. Chen, J. Y. Yang, and M. Asif Khan, Appl. Phys. Lett. 68, 3761 (1996).
G. Parish, S. Keller, P. Kozodoy, J. P. Ibbetson, H. Marchand, P. T. Fini, S. B. Fleischer, S. P. Denbaars, U. K. Mishra, and E. J. Tarsa, Appl. Phys. Lett. 75, 247 (1999).
D. Walker, V. Kumar, K. Mi, P. Sandvik, P. Kung, X. H. Zhang, and M. Razeghi, Appl. Phys. Lett. 76, 403 (2000).
E. J. Tarsa, P. Kozodoy, J. Ibbetson, B. P. Keller, G. Parish, and U. Mishra, Appl. Phys. Lett. 77, 316 (2000).
D. J. H. Lambert, M. M. Wong, U. Chowdhury, C. Collins, T. Li, H. K. Kwon, B. S. Shelton, T. G. Zhu, J. C. Campbell, and R. D. Dupuis, Appl. Phys. Lett. 77, 1900 (2000).
J. D. Brown, J. Li, P. Srinivasan, J. Matthews, and J. F. Schetzina, MRS Internet J. Nitride Semicond. Res. 5, 9 (2000)
M. M. Wong, U. Chowdhury, C. J. Collins, B. Yang, J. C. Denyszyn, K. S. Kim, J. C. Campbell, and R. D. Dupuis, Phys. Stat. Sol. (A) 188, 333 (2001).
P. Sandvik, K. Mi, F. Shahedipour, R. McClintock, A. Yasan, P. Kung, M. Razeghi, J. Crystal Growth 231, 366 (2001).
G. Parish, M. Hansen, B. Moran, S. Keller, S. P. Denbaars, and U. K. Mishra, Phys. Stat. Sol. (A) 188, 297 (2001).
A. Hirano, C. Pernot, M. Iwaya, T. Detchprohm, H. Amano, and I. Akasaki, Phys. Stat. Sol. (A) 188, 293 (2001).
J. C. Campbell, C. J. Collins, M. M. Wong, U. Chowdhury, A. L. Beck, and R. D. Dupuis, Phys. Stat. Sol. (A) 188, 283 (2001).
J. Y. Duboz, J. L. Reverchon, D. Adam, B. Damilano, F. Semond, N. Grandjean, and J. Massies, Phys. Stat. Sol. (A) 188, 325 (2001).
T. Li, J. H. Lambert, A. L. Beck, C. J. Collins, B. Yang, M. M. Wong, U. Chowdhury, R. D. Dupuis, and J. C. Campbell, J. Electronic Materials 30, 872 (2001).
A. Osinsky, S. Gangopadhyay, B. W. Lim, M. Z. Anwar, M. A. Khan, D. V. Kuksenkov, and H. Temkin, Appl. Phys. Lett. 72, 742 (1998).
S. L. Rumyantsev, N. Pala, M. S. Shur, R. Gaska, M. E. Levinshtein, V. Adivarahan, J. Yang, G. Simin, and M. Asif Khan, Appl. Phys. Lett. 79, 866 (2001).
V. Adivarahan, G. Simin, G. Tamulaitis, R. Srinivasan, J. Yang, M. Asif Khan, M. S. Shur, and R. Gaska, Appl. Phys. Lett. 79, 1903 (2001).
E. Monroy, F. Calle, J. L. Pau, F. J. Sanchez, E. Munoz, F. Omnes, B. Beaumont, and P. Gibart, J. Appl. Phys. 88, 2081 (2000).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Biyikli, N., Aytur, O., Kimukin, I. et al. Solar-Blind AlGaN-based Schottky Photodiodes With High Detectivity and Low Noise. MRS Online Proceedings Library 743, 711 (2002). https://doi.org/10.1557/PROC-743-L7.11
Published:
DOI: https://doi.org/10.1557/PROC-743-L7.11