Abstract
We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
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E.W. Wong, P.E. Sheehan and C.M. Lieber, Science, 277, 1971 (1997).
J Cumings and A. Zettl, Science, 289, 602 (2000).
R. H. Baughman, C. Cui, A.A. Zakhidov, Z. Iqbal, J.N. Barisci, G.M. Spinks, G.G. Wallace, A. Mazzoldi, D. De Rossi, A.G. Rinzler, O. Jaschinski, S. Roth and M. Kertesz, Science, 284, 1340 (1999).
S.-B. Lee, K.B.K. Teo, M. Chhowalla, D.G. Hasko, G.A.J. Amaratunga, W.I. Milne and H. Ahmed, Microelectron. Eng. 60–61, 475 (2002).
G.-T. Kim, G. Gu, U. Waizmann and S. Roth, Appl. Phys. Lett. 80, 1815 (2002).
Jesper Nygård and David H. Cobden, Appl. Phys. Lett. 79, 4216 (2001).
J.W. Park, J.B. Choi and K.-H. Yoo, Appl. Phys. Lett. 81, 2644 (2002).
M. Suzuki, K. Ishibashi, T. Ida, D. Tsuya, K. Toratani, and Y. Aoyagi, J. Vac. Sci. Technol. B19, 2770 (2001).
Y. Zhang, N.W. Franklin, R.J. Chen and H. Dai, Chem. Phys. Lett. 331, 35 (2000).
Y. Zheng and H Dai, Appl. Phys. Lett. 77, 3015 (2000).
J. Lefebvre, M. Radosavljević, and A. T. Johnson, Appl. Phys. Lett. 76, 3828 (2000).
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Lee, S.B., Robinson, L.A., Teo, K.B. et al. Self-aligned Split Gate Electrodes Fabricated on Suspended Carbon Nanotubes. MRS Online Proceedings Library 741, 72 (2002). https://doi.org/10.1557/PROC-741-J7.2
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DOI: https://doi.org/10.1557/PROC-741-J7.2