Abstract
Characterization of thin magnetic coating layer is always challenging, different analytical methods are required to characterize layer structure and composition. In the present paper, Rutherford backscattering (RBS)[1], particle induced x-ray emission (PIXE)[2], hydrogen forward scattering (HFS)[3] and nuclear reaction analysis (NRA)[4] are used to measure three typical magnetic film structures and coating layer. Carbon, oxygen, nitrogen contents are measured by deuteron NRA and hydrogen content by HFS. Magnetic layers beneath diamond-like carbon (DLC) layer are characterized by RBS and PIXE: PIXE for relative ratios of Cr, Fe, Co and Ni, and RBS for thickness and depth profiles. The analytical results of one test example shown in this paper demonstrate that the combination of these four methods can give complete and precise layer structure and composition.
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References
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Wei, L. Magnetic Film Analysis by RBS, PIXE, HFS and NRA. MRS Online Proceedings Library 721, 45 (2002). https://doi.org/10.1557/PROC-721-J4.5
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DOI: https://doi.org/10.1557/PROC-721-J4.5