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Preparation and properties of amorphous carbon oxynitrides a-CNxOy films made by a nitrogen radical sputter method and by the layer-by-layer method

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Abstract

We have tried to prepare amorphous carbon oxynitrides (a-CNxOy)films by the oxygen radical treatment (ORT) of amorphous carbon nitrides (a-CNx) and also by the layer-by-layer method. Properties of a-CNxOy films were studied with X-ray photoelectron spectroscopy (XPS), photothermal deflection spectroscopy (PDS), ultraviolet-visible (UV-VIS) optical transmittance spectra, Raman spectra and electron spin resonance (ESR). Oxygen radical affects to a-CNx by etching, termination of defects and oxidation. A-CNxOy films are interesting for the application to luminescent materials and also to low dielectric consta nt materials.

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Authors and Affiliations

  1. Department of Electrical Engineering, Gifu University, 1-1 Yanaido, Gifu, 501-1193, Japan

    Yohko Naruse & Shoji Nitta

  2. Department of Electrical and Computer Engineering, Gifu National College of Technology, Sinsei-cho, Motosu-gun, Gifu, 501-0495, Japan

    Hitoe Habuchi

Authors
  1. Yohko Naruse
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  2. Shoji Nitta
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  3. Hitoe Habuchi
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Naruse, Y., Nitta, S. & Habuchi, H. Preparation and properties of amorphous carbon oxynitrides a-CNxOy films made by a nitrogen radical sputter method and by the layer-by-layer method. MRS Online Proceedings Library 675, 1051 (2001). https://doi.org/10.1557/PROC-675-W10.5.1

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  • DOI: https://doi.org/10.1557/PROC-675-W10.5.1

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