Oblique Stacking of Three-Dimensional Dome Islands in Ge/Si Multilayers

MRS Online Proceedings Library volume 648, Article number: 84 (2000) Cite this article

Abstract

The organization of Ge ‘dome’ islands in Ge/Si multilayers has been investigated by cross-sectional transmission electron microscopy. Ge ‘domes’ are found to spontaneously arrange in oblique stacks, replicating at a well-defined angle from one bilayer to the next. The formation of oblique island stacks is governed by a complex interplay of surface strain - generated by the already buried islands - and surface curvature - caused by the inherent tendency of large ‘domes’ to carve out material from the surrounding planar substrate.

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

US$ 39.95

Tax calculation will be finalised during checkout.

References

  1. 1

    X. Hu and S Das Sarma, Phys. Rev. A 61, 62301–1 (2000).

    Article  Google Scholar 

  2. 2

    M.A. Reed, Scientific American 268, 118 (1993).

    CAS  Article  Google Scholar 

  3. 3

    O.I. Micicet al. J. Phys. Chem. 98, 4966 (1994).

    CAS  Article  Google Scholar 

  4. 4

    Q. Xie, A. Madhukar, P. Chen, and N. Kobayashi, Phys.Rev.Lett. 75, 2542 (1995).

    CAS  Article  Google Scholar 

  5. 5

    Y.-W. Mo, D.E. Savage, B.S. Swartzentruber, and M.G. Lagally, Phys. Rev. Lett. 65, 1020 (1990).

    CAS  Article  Google Scholar 

  6. 6

    G. Medeiros-Ribeiro, A.M. Bratkovski, T.I. Kamins, D.A.A. Ohlberg, and R.S. Williams, Science 279, 353 (1998).

    CAS  Article  Google Scholar 

  7. 7

    J. Tersoff, C. Teichert, and M.G. Lagally, Phys.Rev.Lett. 76, 1675 (1996).

    CAS  Article  Google Scholar 

  8. 8

    E. Mateeva, P. Sutter, J.C. Bean, and M.G. Lagally, Appl. Phys. Lett. 71, 3233 (1997).

    CAS  Article  Google Scholar 

  9. 9

    L. Vescan, W. Jäger, C. Dieker, K. Schmidt, A. Hartmann, and H. Lüth, MRS Symp. Proc. 263, 23 (1992).

    CAS  Article  Google Scholar 

  10. 10

    E. Mateeva, P. Sutter, and M.G. Lagally, Appl. Phys. Lett. 74, 567 (1999).

    CAS  Article  Google Scholar 

  11. 11

    P. Sutter and M.G. Lagally, Phys. Rev. Lett. 81, 3471 (1998).

    CAS  Article  Google Scholar 

  12. 12

    F.M. Ross, J. Tersoff, and R.M. Tromp, Phys. Rev. Lett. 80, 984 (1998).

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

  1. Institut für Schicht & Ionentechnik, Forschungszentrum Jülich GmbH, D-52425, Jülich, Germany

    L. Vescan

  2. Department of Physics, Colorado School of Mines, Golden, CO, 80401, USA

    P. Sutter & E. Sutter

Authors
  1. P. Sutter
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. Sutter
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. L. Vescan
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to P. Sutter.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Sutter, P., Sutter, E. & Vescan, L. Oblique Stacking of Three-Dimensional Dome Islands in Ge/Si Multilayers. MRS Online Proceedings Library 648, 84 (2000). https://doi.org/10.1557/PROC-648-P8.4

Download citation