Abstract
The properties of metallic thin films prepared by pulsed laser deposition (PLD) strongly differ from samples grown by conventional thin film techniques like sputtering and evaporation. In many systems (Fe-Nb, Fe-Zr, Cu-Co, Fe-Ag and Ni-Ag), strongly supersaturated solid solutions are formed, a broader formation range occurring for amorphous samples, and nanocrystalline phases are produced. Additionally, metastable phases of larger thickness at the interfaces of multilayers occur. Reasons for these behaviors are discussed with respect to atomic mixing and implantation effects induced by the high instantaneous deposition rate during PLD and the high kinetic energy (>100 eV) of the deposited ions.
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Krebs, HU., Hamp, M., Fähler, S. et al. Formation of Metallic Systems Far From Equilibrium By Pulsed Laser Deposition. MRS Online Proceedings Library 481, 575–580 (1997). https://doi.org/10.1557/PROC-481-575
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DOI: https://doi.org/10.1557/PROC-481-575