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Suspended Conductive Polymer Bridges From Ion Implanted Polymers

MRS Online Proceedings Library volume 396, Article number: 329 (1995) Cite this article

Abstract

Photolithographic processing capabilities of ion implanted polymer (IIP) films spin-coated onto silicon substrates were evaluated to determine the optimum conditions for producing stable, small geometry devices. Films which had a thickness approximately equivalent to or less than the mean range of ions in the polymer had good quality and stability, and could be patterned without change of conductivity to form small geometry resistors with dimensions of 10 to 50 micrometers. Sixteen-element, packaged resistor arrays were produced from ion implanted poly(styrene-acrylonitrile) films. High quality films with resistivities from 400 ohms/square to 10 megohms/square could be produced by the ion implantation technique. Suspended conducting polymer bridges were formed from IIP resistors by etching of a sacrificial layer underlying the IIP film. Electrical and mechanical properties of the bridges are presented.

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References

  1. R. E. Giedd, Y. Q. Wang, M. G. Moss, and J. Kaufmann, to be presented at the 1995 MRS Fall meeting.

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Authors and Affiliations

  1. Brewer Science, Inc., 2401 Brewer Drive, Rolla, MO, 65401, USA

    James Kaufmann & Mary G. Moss

  2. Acadiana Research Laboratory, University of Southwestern Louisiana, P. O. Box 44210, Lafayette, LA, 70504, USA

    Yongqiang Wang

  3. Department of Physics and Astronomy, Southwest Missouri State University, 901 S. National Ave., Springfield, MO, 65804, USA

    Ryan E. Giedd

Authors
  1. James Kaufmann
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  2. Mary G. Moss
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  3. Yongqiang Wang
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  4. Ryan E. Giedd
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Kaufmann, J., Moss, M.G., Wang, Y. et al. Suspended Conductive Polymer Bridges From Ion Implanted Polymers. MRS Online Proceedings Library 396, 329 (1995). https://doi.org/10.1557/PROC-396-329

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  • DOI: https://doi.org/10.1557/PROC-396-329