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Control of Grain Size and Texture of Poly-Si with Atomic Hydrogen UnderIn Situ Ellipsometric Observation

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Abstract

A systematic study was performed to fabricate poly-Si thin films on glass substrates. Amorphous tissues were efficiently removed by forming a textured structure with the aid of atomic hydrogen. According to the real-time observation by spectroscopic ellipsometry(SE), the grain growth was enhanced by permeation of atomic hydrogen into the sub-surface. Hall measurements were made over a rather wide temperature range: 100 K—350 K. A rather high Hall mobility of 20 cm2/Vs or more was obtained at room temperature due to the reduction of amorphous tissues remaining at grain boundaries.

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Authors and Affiliations

  1. The Graduate School, Tokyo Institute of Technology, Nagatsuta, Midori-ku, Yokohama, Japan

    K. Nakamura, T. Akasaka, D. He & I. Shimizu

Authors
  1. K. Nakamura
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  2. T. Akasaka
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  3. D. He
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  4. I. Shimizu
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Nakamura, K., Akasaka, T., He, D. et al. Control of Grain Size and Texture of Poly-Si with Atomic Hydrogen UnderIn Situ Ellipsometric Observation. MRS Online Proceedings Library 358, 871 (1994). https://doi.org/10.1557/PROC-358-871

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  • DOI: https://doi.org/10.1557/PROC-358-871

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