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Observation of Quantum Size Dependent Blue Shift in the Luminescence of Recrystallized Si/SiNx Superlattices

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Abstract

Light emitting Si nanostructures were fabricated by recrystallizing Si/SiNx superlattices grown by plasma enhanced chemical vapor deposition. After recrystallisation by a laser annealing or by rapid thermal annealing the Raman spectra show clearly a confinement effect. A substantial photoluminescence around 470 to 550 nm and at 620 nm is observed after a hydrogen passivation step. The photoluminescence at 620 nm is assigned to carrier recombination via efficient surface states, whereas the blue emission at 470 to 550 nm shows a behaviour expected for quantum confinement effects.

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Authors and Affiliations

  1. Lab. for Micro and Nanostructures, Paul Schemer Institute, CH-5232, Villigen/PSI, Switzerland

    D. A. Grützmacher

  2. Paul Scherrer Institute, Badenerstr. 568, CH-8048, Zürich, Switzerland

    E. F. Steigmeier, H. Auderset, R. Morf & B. Delley

  3. Lab. for Solid State Physics, Swiss Federal Institute of Technology, Zürich, Switzerland

    R. Wessicken

Authors
  1. D. A. Grützmacher
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  2. E. F. Steigmeier
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  3. H. Auderset
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  4. R. Morf
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  5. B. Delley
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  6. R. Wessicken
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Grützmacher, D.A., Steigmeier, E.F., Auderset, H. et al. Observation of Quantum Size Dependent Blue Shift in the Luminescence of Recrystallized Si/SiNx Superlattices. MRS Online Proceedings Library 358, 833 (1994). https://doi.org/10.1557/PROC-358-833

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  • DOI: https://doi.org/10.1557/PROC-358-833

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